# US 10,309,026 B2 · Stabilization of metallic nanowire meshes via encapsulation

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- Number: US 10,309,026 B2
- Document ID: US10309026B2
- Status: Granted
- Kind: B2
- Application number: 14/841,944
- Filed: 2015-09-01
- Published: 2017-03-02
- Granted: 2019-06-04
- Earliest claimed: 2015-09-01
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Talia S. Gershon; Supratik Guha; Teodor K. Todorov; Theodore G. van Kessel
- Web page: https://patentgrep.com/patent/US10309026B2

## CPC

- C25D 5/48: After-treatment of electroplated surfaces
- C23C 18/1216: {Metal oxides (C23C18/1212 takes precedence)}
- C23C 18/1291: {by heating of the substrate}
- C23C 28/322: {only coatings of metal elements only}
- C23C 28/345: {with at least one oxide layer}
- C25D 5/02: Electroplating of selected surface areas
- C25D 7/00: Electroplating characterised by the article coated
- C25D 7/0607: {Wires}
- H10F 77/244: {made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers}
- C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

Techniques for mechanically stabilizing metallic nanowire meshes using encapsulation are provided. In one aspect, a method for forming a mechanically-stabilized metallic nanowire mesh is provided which includes the steps of: forming the metallic nanowire mesh on a substrate; and coating the metallic nanowire mesh with a metal oxide that encapsulates the metallic nanowire mesh to mechanically-stabilize the metallic nanowire mesh which permits the metallic nanowire mesh to remain conductive at temperatures greater than or equal to about 600° C. A mechanically-stabilized metallic nanowire mesh is also provided.

## Claims

### Claim 1

A method for forming a mechanically-stabilized metallic nanowire mesh, the method comprising the steps of:
forming the metallic nanowire mesh on a substrate;
coating the metallic nanowire mesh with a metal oxide that encapsulates the metallic nanowire mesh to mechanically-stabilize the metallic nanowire mesh which permits the metallic nanowire mesh to remain conductive at temperatures greater than or equal to about 600° C., wherein the metal oxide is doped with a dopant selected from the group consisting of: niobium, iron and nickel to increase an electrical conductivity of the metal oxide;
placing platinum mesh electrodes in contact with opposite ends of the metallic nanowire mesh coated with the metal oxide;
heating the metallic nanowire mesh coated with the metal oxide; and
measuring a resistance of the metallic nanowire mesh coated with the metal oxide as a function of temperature.

### Claim 2 (depends on 1)

The method of claim 1, wherein the metallic nanowire mesh comprises silver, nickel, palladium, platinum, or gold nanowires.

### Claim 3 (depends on 1)

The method of claim 1, wherein the metal oxide comprises a material selected from the group consisting of: titanium oxide, tin oxide, and gallium oxide.

### Claim 4 (depends on 1)

The method of claim 1, wherein the step of forming the metallic nanowires on the substrate comprises the steps of:
preparing a suspension of metallic nanowires in a solvent; and
depositing the suspension onto the substrate.

### Claim 5 (depends on 4)

The method of claim 4, wherein the solvent comprises water or isopropyl alcohol.

### Claim 6 (depends on 1)

The method of claim 1, wherein the step of coating the metallic nanowire mesh with the metal oxide comprises the steps of:
preparing a metal oxide precursor solution; and
spraying the metal oxide precursor solution onto the metallic nanowire mesh while the substrate is held at a temperature of from about 150° C. to about 200° C.

### Claim 7 (depends on 6)

The method of claim 6, wherein the metal oxide comprises titanium oxide, and wherein the metal oxide precursor solution comprises titanium isopropoxide.

### Claim 8 (depends on 1)

The method of claim 1, further comprising the step of:
fusing individual metallic nanowires in the metallic nanowire mesh together using a metal.

### Claim 9 (depends on 8)

The method of claim 8, wherein the metal comprises palladium.

### Claim 10 (depends on 8)

The method of claim 8, wherein the step of fusing the metallic nanowires together using the metal is performed before the step of coating the metallic nanowire mesh with the metal oxide.

### Claim 11 (depends on 8)

The method of claim 8, further comprising the step of:
electroplating the metal onto the metallic nanowire mesh.

### Claim 12

A method for forming a mechanically-stabilized metallic nanowire mesh, the method comprising the steps of:
forming the metallic nanowire mesh on a substrate;
electroplating a metal onto the metallic nanowire mesh so as to fuse individual metallic nanowires in the metallic nanowire mesh together;
coating the metallic nanowire mesh with a metal oxide that encapsulates the metallic nanowire mesh to mechanically-stabilize the metallic nanowire mesh which permits the metallic nanowire mesh to remain conductive at temperatures greater than or equal to about 600° C., wherein the metal oxide is doped with a dopant selected from the group consisting of: niobium, iron and nickel to increase an electrical conductivity of the metal oxide;
placing platinum mesh electrodes in contact with opposite ends of the metallic nanowire mesh coated with the metal oxide;
heating the metallic nanowire mesh coated with the metal oxide; and
measuring a resistance of the metallic nanowire mesh coated with the metal oxide as a function of temperature.

### Claim 13 (depends on 12)

The method of claim 12, wherein the metallic nanowire mesh comprises silver, nickel, palladium, platinum, or gold nanowires.

### Claim 14 (depends on 12)

The method of claim 12, wherein the metal comprises palladium.

### Claim 15 (depends on 1)

The method of claim 1, wherein the metal oxide comprises gallium oxide doped with niobium.

### Claim 16 (depends on 1)

The method of claim 1, wherein the metal oxide comprises titanium oxide doped with iron or nickel.

### Claim 17 (depends on 1)

The method of claim 1, wherein the resistance of the metallic nanowire mesh coated with the metal oxide is less than or equal to about 100 Ohms at the temperature of about 600° C.
