# US 10,309,024 B2 · Electroplating apparatus and process for wafer level packaging > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,309,024 B2 - Document ID: US10309024B2 - Status: Granted - Kind: B2 - Application number: 15/958,525 - Filed: 2018-04-20 - Published: 2018-08-23 - Granted: 2019-06-04 - Earliest claimed: 2010-12-01 - Assignees: Novellus Systems, Inc. - Applicants: Novellus Systems, Inc. - Inventors: Steven T. Mayer; David W. Porter - Web page: https://patentgrep.com/patent/US10309024B2 ## CPC - C25D 3/60: containing more than 50% by weight of tin - C25C 1/20: of noble metals - C25C 7/00: Constructional parts, or assemblies thereof, of cells; Servicing or operating of cells (for the production of aluminium C25C3/06 - C25C3/22) - C25D 3/56: of alloys - C25D 5/022: {using masking means} - C25D 5/48: After-treatment of electroplated surfaces - C25D 7/123: {Semiconductors first coated with a seed layer or a conductive layer} - C25D 17/001: {Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells} - C25D 17/002: {Cell separation, e.g. membranes, diaphragms} - C25D 21/12: Process control or regulation (controlling or regulating in general G05) - C25D 21/14: Controlled addition of electrolyte components - C25D 21/18: of electrolytes (C25D21/22 takes precedence) - C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR - C25C: PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR ## Abstract An apparatus for continuous simultaneous electroplating of two metals having substantially different standard electrodeposition potentials (e.g., for deposition of Sn—Ag alloys) comprises an anode chamber for containing an anolyte comprising ions of a first, less noble metal, (e.g., tin), but not of a second, more noble, metal (e.g., silver) and an active anode; a cathode chamber for containing catholyte including ions of a first metal (e.g., tin), ions of a second, more noble, metal (e.g., silver), and the substrate; a separation structure positioned between the anode chamber and the cathode chamber, where the separation structure substantially prevents transfer of more noble metal from catholyte to the anolyte; and fluidic features and an associated controller coupled to the apparatus and configured to perform continuous electroplating, while maintaining substantially constant concentrations of plating bath components for extended periods of use. ## Claims ### Claim 1 An apparatus for simultaneous electroplating of a first metal and of a second, more noble metal on a cathodically biased substrate, comprising: (a) a cathode chamber for housing the cathodically biased substrate and a catholyte during electroplating, wherein the cathode chamber comprises an inlet and an outlet; (b) an anode chamber for housing an active anode and an anolyte, wherein the anode chamber comprises an inlet and an outlet; (c) a separation structure between the cathode chamber and the anode chamber, wherein the separation structure is permeable to water and protons but is configured to substantially prevent ions of the second metal from passing through the separation structure from the cathode chamber to the anode chamber during electroplating; (d) a fluidic conduit, other than the separation structure, between the anode chamber and the cathode chamber and (e) a controller programmed for simultaneous electroplating of the first and second metals on the cathodically biased substrate, the controller including program instructions for causing: (i) a cathodic bias at the substrate that is sufficient to cause electrodeposition of the first and second metal on the biased substrate from the catholyte containing ions of the first and second metal, and is also sufficient to cause transfer of water through the separation structure from the anode chamber to the cathode chamber during electroplating; (ii) delivery of an acid solution to the anode chamber via the inlet in the anode chamber, from a source outside the anode chamber; (iii) removal of a portion of catholyte from the catholyte chamber via the outlet in the cathode chamber to make room for a volume of fluid that is transferring from the anode chamber to the cathode chamber; (iv) delivery of ions of the second metal to the cathode chamber; (v) delivery of the anolyte from the anode chamber to the cathode chamber via the fluidic conduit, wherein the volume of fluid that is transferring from the anode chamber to the cathode chamber comprises a volume of water that is transported from the anode chamber to the cathode chamber through the separation structure and a volume of anolyte that is delivered from the anode chamber to the cathode chamber through the fluidic conduit, wherein the program instructions cause maintenance of proton concentration in the catholyte such that it does not fluctuate by more than about 10% over the period of at least about 0.2 bath charge turnovers. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the separation structure comprises a cationic membrane, configured for allowing transport of protons, water, and ions of the first metal from anolyte to catholyte during plating. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the first metal is tin and the second metal is silver. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the apparatus comprises the active anode housed in the anode chamber, wherein the active anode comprises low alpha tin. ### Claim 5 (depends on 1) The apparatus of claim 1, further comprising a pressure regulator in fluid communication with the anode chamber. ### Claim 6 (depends on 5) The apparatus of claim 5, wherein the pressure regulator comprises a vertical column arranged to serve as a conduit through which the electrolyte flows upward before spilling over a top of the vertical column, and wherein, in operation, the vertical column provides a pressure head which maintains a substantially constant pressure in the anode chamber. ### Claim 7 (depends on 5) The apparatus of claim 5, wherein the pressure regulator is incorporated into an anolyte circulation loop which circulates anolyte out of the anode chamber, through the pressure regulator, and back into the anode chamber. ### Claim 8 (depends on 7) The apparatus of claim 7, wherein the anolyte circulation loop further comprises an inlet for introducing additional fluid comprising a component selected from the group consisting of water, acid, and ions of the first metal, into the anolyte circulation loop. ### Claim 9 (depends on 1) The apparatus of claim 1, further comprising a source comprising a component selected from the group consisting of water, acid, and ions of the first metal fluidically coupled with the anode chamber. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein the second metal is silver, and wherein the apparatus further comprising a source of silver ions fluidically coupled to the cathode chamber. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein the second metal is silver, and wherein the apparatus further comprises a silver anode fluidically coupled to the cathode chamber, wherein the silver anode is configured to be electrochemically dissolved into the catholyte and thereby provide silver ions to the catholyte, but not to the anolyte. ### Claim 12 (depends on 1) The apparatus of claim 1, further comprising a pump associated with the fluidic conduit which enables transfer of anolyte to the catholyte either directly or via a reservoir. ### Claim 13 (depends on 1) The apparatus of claim 1, wherein the first metal is tin and the second metal is silver, wherein the apparatus further comprises a structure configured for: receiving the removed portion of catholyte; separating tin from silver in the removed portion of catholyte; and forming a first solution comprising tin ions and/or a second solution comprising silver ions, wherein at least one of said solutions is suitable for reuse. ### Claim 14 (depends on 13) The apparatus of claim 13, wherein the apparatus comprises an electrowinning station configured for electrowinning silver from the removed portion of catholyte under controlled potential, wherein the controller further comprises program instructions for causing a delivery of a tin-containing silver-free solution obtained after electrowinning to the anode chamber. ### Claim 15 (depends on 1) The apparatus of claim 1, wherein the controller is configured for controlling electrolyte composition using coulemetric data. ### Claim 16 (depends on 1) The apparatus of claim 1, wherein the controller comprises program instructions for causing maintenance of substantially constant compositions of the anolyte and of the catholyte. ### Claim 17 (depends on 1) The apparatus of claim 1, wherein the first metal is tin and the second metal is silver, wherein the controller comprises program instructions for causing regeneration of tin from removed portions of catholyte by electrowinning silver from removed portions of catholyte. ### Claim 18 (depends on 1) The apparatus of claim 1, wherein the controller further comprises program instructions for causing a delivery of ions of the first metal to the anode chamber. ### Claim 19 (depends on 1) A system, comprising the apparatus of claim 1 and a stepper.