Use of a reactive, or reducing gas as a method to increase contact lifetime in micro contact mems switch devices

An article of manufacture comprising a MEMS device that comprises a sealed chamber containing an electro mechanical element having operating surfaces, said sealed chamber containing a reactive gas comprising a reducing gas selected to react with any contaminants on said operating surfaces of said MEMS device in said sealed chamber in a manner to maximize the electrical conductivity of said operating surfaces during operation of said MEMS device;

• wherein said MEMS device comprises a MEMS switch and said operating surfaces comprise electrically conductive switch contact surface;
• wherein said reactive gas comprises hydrogen or an azane or combinations thereof;
• and wherein said azane reactive gas comprises a non-explosive azane selected from a homologous series of inorganic compounds with the general chemical formula NnHn+2, where n=1˜7 or combinations thereof.

An article of manufacture comprising a MEMS device that comprises a sealed chamber containing an electro mechanical element having operating surfaces, said sealed chamber containing a reactive gas comprising a reducing gas selected to react with any contaminants on said operating surfaces of said MEMS device in said sealed chamber in a manner to maximize the electrical conductivity of said operating surfaces during operation of said MEMS device;

• said reactive gas comprises hydrogen or an azane or combinations thereof;
• said azane reactive gas comprises a non-explosive azane selected from a homologous series of inorganic compounds with the general chemical formula NnHn+2, where n=1˜7 or combinations thereof;
• and said reactive gas is optionally mixed with an inert gas to control the reactivity of said reactive gas.

An article of manufacture comprising a MEMS device that comprises a sealed chamber containing an electro mechanical element having operating surfaces, said sealed chamber containing a reactive gas comprising a reducing gas selected to react with any contaminants on said operating surfaces of said MEMS device in said sealed chamber in a manner to maximize the electrical conductivity of said operating surfaces during operation of said MEMS device;

• wherein said reactive gas comprises hydrogen or an azane or combinations thereof;
• wherein said azane reactive gas comprises a non-explosive azane selected from a homologous series of inorganic compounds with the general chemical formula NnHn+2, where n=1˜7 combinations thereof;
• and said reactive gas is optionally mixed with an inert gas to control the reactivity of said reactive gas, wherein said inert gas is selected from nitrogen or a noble gas and combinations thereof.