Roller assembly and method for transporting a substrate using the same
AssigneeIndustrial Technology Research Institute
InventorsKuo-Hsin Huang, Chao-Feng Sung, Yu-Lin Hsu, Hsin-Yun Hsu
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Abstract
A roller assembly for transporting a substrate includes a step roller and a plurality of first auxiliary rollers. The step roller includes a main roller, and a pair of edge rollers sleeved on the main roller and located on two opposite ends of the main roller, respectively. The plurality of first auxiliary rollers are disposed on two opposite sides of the step roller, respectively. A first film forms a closed loop through the first film being rolled on the plurality of first auxiliary rollers and the step roller cyclically. A method using the same is also provided.
Claims20
A roller assembly for transporting a substrate, comprising:
- a step roller, comprising:
- a main roller;
- and
- a pair of edge rollers, disposed on the main roller and located on two opposite ends of the main roller, respectively;
- and
- a plurality of first auxiliary rollers disposed on two opposite sides of the step roller, respectively, wherein a first film forms a closed loop through the first film being rolled on the plurality of first auxiliary rollers and the step roller cyclically.
A method for transporting a substrate with a roller assembly, comprising:
- radially transporting the substrate and passing through a step roller;
- attaching a first film to the substrate and using as a stacked film before the substrate is transported and passes through the step roller;
- and
- supporting two edges of the stacked film by a pair of edge rollers, wherein the pair of edge rollers are sleeved on a main roller of the step roller and are located on two opposite ends of the main roller, respectively.
Dependencies are inferred from the claim text.