# US 10,308,445 B2 · Substrate processing device

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- Number: US 10,308,445 B2
- Document ID: US10308445B2
- Status: Granted
- Kind: B2
- Application number: 16/115,335
- Filed: 2018-08-28
- Published: 2019-03-07
- Granted: 2019-06-04
- Earliest claimed: 2017-09-05
- Assignees: Sharp Kabushiki Kaisha
- Applicants: Sharp Kabushiki Kaisha
- Inventors: Yohhei Shinzaki
- Web page: https://patentgrep.com/patent/US10308445B2

## CPC

- B65G 49/064: {in a horizontal position (B65G49/066 takes precedence)}
- F16C 3/02: Shafts; Axles
- F16C 13/006: {Guiding rollers, wheels or the like, formed by or on the outer element of a single bearing or bearing unit, e.g. two adjacent bearings, whose ratio of length to diameter is generally less than one}
- F16C 13/02: Bearings
- F16C 33/583: {Details of specific parts of races}
- B65G 2249/02: Controlled or contamination-free environments or clean space conditions
- F16C 2235/00: Cleaning
- F16C 2300/40: related to environment, i.e. operating conditions
- F16C 2326/58: Conveyor systems, e.g. rollers or bearings therefor
- B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D)
- F16C: SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS

## Abstract

A substrate processing device includes shafts, rollers, a gas blowing unit, bearings, and s suction unit. The shafts include internal spaces and first through holes communicated with the internal spaces. The rollers are attached to the shafts to be rotatable about axes of the shafts for conveying a substrate. The gas blowing unit is configured to blow gas to the substrate carried by the rollers. The bearings support the shafts to be rotatable and include second through holes communicated with the first through holes of the shafts. The bearings include inner rings fitted on the shafts, outer rings opposed to outer peripheries of the inner rings, respectively, and rolling components disposed between the inner rings and the outer rings. The suction unit is configured to suck air in the internal spaces of the shafts.

## Claims

### Claim 1

A substrate processing device comprising:
Shafts including internal spaces and first through holes communicated with the internal spaces;
Rollers attached to the shafts to be rotatable about axes of the shafts for conveying a substrate;
a gas blowing unit configured to blow gas to the substrate carried by the rollers;
bearings supporting the shafts to be rotatable and including second through holes communicated with the first through holes of the shafts, the bearings including inner rings fitted on the shafts, outer rings opposed to outer peripheries of the inner rings, respectively, and rolling components disposed between the inner rings and the outer rings; and
a suction unit configured to suck air in the internal spaces of the shafts.

### Claim 2 (depends on 1)

The substrate processing device according to claim 1, wherein
each of the shafts includes an opening into one of the internal spaces included in the each of the shafts, and
the opening is located at an end of the each of the shafts.

### Claim 3 (depends on 1)

The substrate processing device according to claim 1, wherein each of the bearings includes two of the second through holes at positions corresponding to sides of corresponding one of the rolling components with respect to the longitudinal direction of the shafts.

### Claim 4 (depends on 1)

The substrate processing device according to claim 1, wherein each of the first through hole has a cross-sectional area greater than that of each of the second through holes.

### Claim 5 (depends on 1)

The substrate processing device according to claim 1, wherein at least two first through holes are communicated with each of the second through holes.

### Claim 6 (depends on 1)

The substrate processing device according to claim 1, wherein
the inner rings include recesses, and
the shafts include protrusions fitted in the recesses of the respective inner rings.

### Claim 7 (depends on 1)

The substrate processing device according to claim 1, wherein
the shafts include recesses, and
the inner rings include protrusions fitted in the recesses of the respective shafts.