# US 10,307,915 B2 · Inspection method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,307,915 B2 - Document ID: US10307915B2 - Status: Granted - Kind: B2 - Application number: 15/318,685 - Filed: 2014-07-15 - Published: 2017-05-04 - Granted: 2019-06-04 - Earliest claimed: 2014-07-15 - Assignees: Fuji Corporation - Applicants: Fuji Corporation - Inventors: Kazumi Hoshikawa; Kenji Shimosaka; Daisuke Suzuki; Tadakatsu Ibe - Web page: https://patentgrep.com/patent/US10307915B2 ## CPC - B25J 19/0095: {Means or methods for testing manipulators} - B25J 15/06: with vacuum or magnetic holding means - B25J 15/0616: {with vacuum} - B25J 19/00: Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators (safety-devices in general F16P; protection against radiation in general G21F) - G01F 5/00: Measuring a proportion of the volume flow - H05K 13/0409: {Sucking devices} - H05K 13/082: {Integration of non-optical monitoring devices, i.e. using non-optical inspection means, e.g. electrical means, mechanical means or X-rays} - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) - G01F: MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME - H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS ## Abstract An inspection method of a suction nozzle. Air flow rates that flow in multiple reference pipes that have different sectional areas are measured. A proportionality factor between air flow rates and sectional areas of the reference pipes is calculated based on the measured air flow rates of the multiple reference pipes, and the sectional areas of the multiple reference pipes. An air flow rate in a suction nozzle that is an inspection target is measured. The sectional area of the suction nozzle is calculated based on the air flow rate of the suction nozzle and the calculated proportionality factor. The sectional area of the suction nozzle calculated in this manner is substantially fixed even when the pressure of air supplied from an air source fluctuates. The sectional area of the suction nozzle is proportional to the air flow rate that flows in an inner portion of the suction nozzle. ## Claims ### Claim 1 An inspection method for inspecting a suction nozzle that picks up a target object using air suction, the method comprising: a reference pipe measurement step of measuring an air flow rate per unit time which flows in each of multiple reference pipes that have different sectional areas; a proportionality factor calculation step of calculating a proportionality factor between the air flow rates of the reference pipes and sectional areas based on the air flow rate of each of the multiple reference pipes measured in the reference pipe measurement step, and the sectional areas of the multiple reference pipes; a suction nozzle measurement step of measuring the air flow rate per unit time that flows in the suction nozzle which is an inspection target; a sectional area calculation step of calculating a sectional area of the suction nozzle which is the inspection target based on the air flow rate measured in the suction nozzle measurement step, and the proportionality factor calculated in the proportionality factor calculation step; and a determining step for determining whether the suction nozzle which is the inspection target is functioning properly based upon comparing the calculated sectional area of the suction nozzle which is the inspection target and a predetermined sectional area. ### Claim 2 (depends on 1) The inspection method according to claim 1, wherein the suction nozzle is inspected in an environment where an air pressure of an air source used in the inspection method fluctuates. ### Claim 3 (depends on 1) The inspection method according to claim 1, further comprising an adjustment step of adjusting an air pressure of air from an air source used in the inspection method. ### Claim 4 (depends on 3) The inspection method according to claim 3, further comprising a depressurizing step of depressurizing an airflow path used in the inspection method. ### Claim 5 (depends on 1) The inspection method according to claim 1, further comprising a transport step of detaching a tray containing the suction nozzle which is the inspection target from a work machine and accommodating the tray inside a nozzle management device. ### Claim 6 An inspection method for inspecting a suction nozzle that picks up an object using air suction, the method comprising: a pressure adjustment step of adjusting a pressure of air supplied from a first air source to a set pressure; a flow rate adjustment step of adjusting a flow rate per unit time of air that flows inside an air flow path to a set amount using air of a pressure which is adjusted in the pressure adjustment step; an air source exchanging step of exchanging a first air source for a second air source that has greater pressure fluctuation than the first air source after adjustment of the flow rate of air by the flow rate adjustment step is completed; a first measurement step of measuring a flow rate per unit time of air that flows inside the air flow path after exchanging of air sources by the air source exchanging step is completed; a second measurement step of measuring a flow rate per unit time of air which flows inside the air flow path in a state in which a suction nozzle which is an inspection target is connected to the air flow path; and an estimated flow rate calculation step of calculating a value, which is obtained by multiplying the flow rate per unit time measured in the second measurement step by a ratio of the flow rate per unit time measured in the first measurement step to the set amount, as an estimated flow rate.