# US 10,307,798 B2 · Cleaning device for cleaning electroplating substrate holder

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- Number: US 10,307,798 B2
- Document ID: US10307798B2
- Status: Granted
- Kind: B2
- Application number: 14/839,625
- Filed: 2015-08-28
- Published: 2017-03-02
- Granted: 2019-06-04
- Earliest claimed: 2015-08-28
- Assignees: Taiwan Semiconducter Manufacturing Company Limited
- Applicants: Taiwan Semiconductor Manufacturing Co., Ltd.
- Inventors: Yu-Young Wang; Chung-En Kao; Victor Y. Lu
- Web page: https://patentgrep.com/patent/US10307798B2

## CPC

- B08B 17/025: {Prevention of fouling with liquids by means of devices for containing or collecting said liquids}
- B08B 3/02: Cleaning by the force of jets or sprays
- C25D 21/08: Rinsing
- B08B 2203/0229: Suction chambers for aspirating the sprayed liquid
- C25D 17/06: Suspending or supporting devices for articles to be coated
- C25D 21/00: Processes for servicing or operating cells for electrolytic coating
- B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR

## Abstract

A cleaning device for removing contamination on a substrate holder used with an electroplating cell includes an arm, a cleaning agent supplier, a nozzle and a receiver. The cleaning agent supplier is coupled to the arm and configured to supply a cleaning agent. The nozzle is coupled to the cleaning agent supplier and configured to spray the cleaning agent onto the substrate holder to remove the contamination. The receiver is coupled to the arm and configured to receive the cleaning agent after the cleaning agent is sprayed onto the substrate holder.

## Claims

### Claim 1

A cleaning device for removing contamination on a substrate holder used with an electroplating cell, comprising:
an arm;
a cleaning agent supplier coupled to the arm and configured to supply a cleaning agent;
a first nozzle coupled to the cleaning agent supplier and configured to spray the cleaning agent onto the substrate holder to remove the contamination; and
a receiver coupled to the arm, wherein:
the receiver comprises a first sidewall and a second sidewall,
the receiver is configured to receive the substrate holder between the first sidewall and the second sidewall such that the first sidewall and the second sidewall are on diametrically opposite sides of the substrate holder,
the receiver is configured to receive the cleaning agent after the cleaning agent is sprayed onto the substrate holder, and
the first nozzle is on the first sidewall.

### Claim 2 (depends on 1)

The cleaning device of claim 1, wherein the cleaning agent supplier is embedded in the arm.

### Claim 3 (depends on 1)

The cleaning device of claim 1, wherein the cleaning agent supplier is embedded in the receiver.

### Claim 4 (depends on 1)

The cleaning device of claim 1, wherein the receiver comprises a vent disposed on a surface extending between the first sidewall and the second sidewall, and the cleaning agent is received in the vent after the cleaning agent is sprayed onto the substrate holder.

### Claim 5 (depends on 1)

The cleaning device of claim 1, comprising:
a second nozzle on the second sidewall.

### Claim 6 (depends on 1)

The cleaning device of claim 1, wherein:
the substrate holder comprises a plurality of lip seals for forming a seal with a substrate, and
the first nozzle is configured to spray the cleaning agent onto at least one of the plurality of lip seals.

### Claim 7 (depends on 6)

The cleaning device of claim 6, wherein the receiver comprises a bottom extending between the first sidewall and the second sidewall such that the receiver surrounds the at least one of the plurality of lip seals on at least three sides.

### Claim 8 (depends on 6)

The cleaning device of claim 6, wherein:
the substrate holder comprises a plurality of electrical contacts over the plurality of lip seals, and
the first nozzle is configured to further spray the cleaning agent onto at least one of the plurality of electrical contacts.

### Claim 9 (depends on 8)

The cleaning device of claim 8, wherein the receiver comprises a bottom extending between the first sidewall and the second sidewall such that the receiver surrounds the at least one of the plurality of lip seals and the at least one of the plurality of electrical contacts on at least three sides.

### Claim 10 (depends on 1)

The cleaning device of claim 1, wherein the cleaning agent comprises at least one of acid, dry solvent, or inert gas.

### Claim 11 (depends on 1)

The cleaning device of claim 1, wherein:
the receiver comprises a ceiling, and
the ceiling extends from the second sidewall toward the first sidewall.