# US 10,307,789 B2 · Structure comprising a 2-dimensional material

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- Number: US 10,307,789 B2
- Document ID: US10307789B2
- Status: Granted
- Kind: B2
- Application number: 14/887,163
- Filed: 2015-10-19
- Published: 2017-04-20
- Granted: 2019-06-04
- Earliest claimed: 2015-10-19
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Pio Peter Niraj Nirmalraj
- Web page: https://patentgrep.com/patent/US10307789B2

## CPC

- H10D 62/80: characterised by the materials
- B05D 7/52: {Two layers}
- H10D 30/47: having two-dimensional [2D] charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
- H10D 62/8503: {Nitride Group III-V materials, e.g. AlN or GaN}
- H10D 62/882: {Graphene}
- H10D 64/68: characterised by the insulator, e.g. by the gate insulator
- H10K 77/00: Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- B05D 7/50: {Multilayers}
- B05D 2202/00: Metallic substrate
- B05D 2350/60: Adding a layer before coating
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- B05D: PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (conveying articles or workpieces through baths of liquid B65G, e.g. B65G49/02)
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

A method is provided for fabricating a structure including a two-dimensional material. The method includes a step of providing an electrically-conducting substrate and a step of forming a solid organic spacer layer on the electrically-conducting substrate. The method further includes depositing the two-dimensional material on the spacer layer. A structure formed according to the method includes an electrically-conducting substrate and a layer of a two-dimensional material. A solid organic spacer layer is arranged between the electrically-conducting substrate and the layer of the two-dimensional material.

## Claims

### Claim 1

A method for fabricating a structure comprising a two-dimensional material, the method comprising the steps of:
providing an electrically-conducting substrate;
forming a solid organic spacer layer on the conducting substrate; and
depositing the two-dimensional material on the spacer layer, the depositing performed at a gas pressure of approximately 2 mbar and utilizing a spray gun having a nozzle diameter of approximately 0.1 mm.

### Claim 2 (depends on 1)

The method as recited in claim 1, wherein forming the solid organic spacer layer comprises:
depositing a liquid solution comprising organic molecules solubilized in a solvent on the conducting substrate; and
annealing the liquid solution to remove the solvent and create the solid organic spacer layer.

### Claim 3 (depends on 2)

The method as recited in claim 2, wherein depositing the liquid solution comprises spraying the liquid solution comprising the solubilized organic molecules on the electrically-conducting substrate.

### Claim 4 (depends on 1)

The method as recited in claim 1, wherein depositing the two-dimensional material comprises depositing a liquid solution comprising the two-dimensional material solubilized in a solvent.

### Claim 5 (depends on 1)

The method as recited in claim 1, wherein the steps of forming the solid organic spacer layer on the conducting substrate and depositing the two-dimensional material on the spacer layer are performed at a temperature of between 10° C. and 40° C.

### Claim 6 (depends on 1)

The method as recited in claim 1, wherein the conducting substrate comprises one of a metal and a semiconductor.

### Claim 7 (depends on 1)

The method as recited in claim 1, wherein the spacer layer is a monolayer of organic molecules.

### Claim 8 (depends on 1)

The method as recited in claim 1, wherein the spacer layer comprises organic molecules selected from the group consisting of alkanes (CnH2n+2), cycloalkanes (CnH2n), alkyl organic molecules, and thiols.

### Claim 9 (depends on 8)

The method as recited in claim 8, wherein the alkane, cycloalkane, alkyl and thiol organic molecules have a chain length between C20 and C100.

### Claim 10 (depends on 1)

The method as recited in claim 1, wherein the two-dimensional material is selected from the group consisting of graphene, transition metal dichalcogenide (TMD), MoS2, WS2, WSe2 and BN.