Thin film valve apparatus using a fluid hole closing membrane

A thin film valve apparatus, comprising:

• a plurality of chambers configured to store a fluid;
• a fluid path comprising a fluid hole, and connecting the plurality of chambers;
• a multilayered plurality of substrates forming the plurality of chambers, the fluid path, and the fluid hole;
• a black membrane configured to close the fluid hole;
• a laser beam generator disposed below a rotatable disk, and configured to output a laser beam to melt the black membrane to open the fluid hole;
• an optical sensor disposed proximate an upper or lower surface of the disk, and configured to measure an intensity of light passing through the fluid hole;
• an actuator configured to vary a focusing distance of the laser beam on the black membrane;
• and
• a feedback control device configured to turn off the laser beam generator, in response to the optical sensor measuring that the intensity of the light passing through the fluid hole exceeds a threshold,
• wherein the multilayered plurality of substrates, the flow path, the fluid hole, the plurality of chambers, and the black membrane are integrated into the disk.