# US 10,307,606 B2 · Device for generating plasma, system for generating plasma and method for generating plasma

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- Number: US 10,307,606 B2
- Document ID: US10307606B2
- Status: Granted
- Kind: B2
- Application number: 15/352,630
- Filed: 2016-11-16
- Published: 2017-05-18
- Granted: 2019-06-04
- Earliest claimed: 2015-11-17
- Assignees: Leibniz-Institut FüR Plasmaforschung Und Technologie E.V.
- Applicants: Leibniz-Institut für Plasmaforschung und Technologie e.V.
- Inventors: Klaus-Dieter Weltmann; Ronny Brandenburg; Manfred Stieber; Stefan Horn; Philipp Turski
- Web page: https://patentgrep.com/patent/US10307606B2

## CPC

- A61N 1/44: Applying ionised fluids {(ion generators H01J37/00)}
- A61B 18/042: {using additional gas becoming plasma}
- A61L 2/02: using physical processes
- A61L 2/14: Plasma, i.e. ionised gases
- H05H 1/2406: {using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes}
- A61L 2103/05: Living organisms or biological materials
- A61L 2202/11: Apparatus for generating biocidal substances, e.g. vaporisers, UV lamps
- H05H 1/2431: {using cylindrical electrodes, e.g. rotary drums}
- H05H 1/2437: {Multilayer systems}
- A61N: ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY (measurement of bioelectric currents A61B; surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body A61B18/00; anaesthetic apparatus in general A61M; incandescent lamps H01K; infrared radiators for heating H05B)
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)
- A61L: METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES (preservation of bodies or disinfecting characterised by the agents employed A01N; preserving, e.g. sterilising, food or foodstuffs A23; preparations for medical, dental or toiletry purposes A61K)
- H05H: PLASMA TECHNIQUE (apparatus or processes specially adapted for producing X-rays H05G2/00); PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS

## Abstract

A device for generating plasma (1) comprises a high voltage electrode (10) as well as at least one external electrode (11, 12), wherein the high voltage electrode (10) at least in one coordinate direction (34) is arranged between conductive material of at least one external electrode (11, 12). The high voltage electrode (10) is covered with a dielectric (21) at least one side facing an external electrode (11, 12). Between the respective external electrode (11, 12) and the high voltage electrode (10) over its longitudinal extension at least one spacer element (20) is present, which at least in the region of its arrangement electrically insulates the respective external electrode (11,12) from the high voltage electrode (10) and which positions the respective external electrode (11, 12) at a constant distance from the high voltage electrode (10), wherein the spacer element is a gas-permeable foil.

## Claims

### Claim 1

A device for generating plasma (1), comprising; a high voltage electrode (10) in the form of a wire sheathed with a dielectric at least one extremal electrode (11, 12), wherein the at least one external electrode (11, 12) is grounded; one or more spacer elements (20) in the form of silicone tube pieces of a gas-permeable foil positioned over sections of a longitudinal extension of the high voltage electrode (10), wherein the spacer elements (20) position the at least one external electrode (11, 12) at a constant distance from the high voltage electrode (10); wherein the high voltage electrode (10) is arranged at least in a coordinate direction (34) between or adjacent to conductive material of the at least one external electrode (11, 12); wherein the device for generating plasma (1) comprises a first external electrode (11) and a second external electrode (12), wherein the high voltage electrode (10) is arranged between the first external electrode (11) and the second external electrode (12).

### Claim 2 (depends on 1)

The device for generating plasma according to claim 1, characterized in that the high voltage electrode (10) has a form of a meander or spiral-shaped course.

### Claim 3 (depends on 1)

The device for generating plasma according to claim 1, characterized in that the high voltage electrode (10) is present as a mesh, weave, fabric or knitted fabric.

### Claim 4 (depends on 1)

The device for generating plasma according to claim 1, characterized in that the at least one external electrode (11, 12) is present as a mesh, weave, fabric or knitted fabric.

### Claim 5 (depends on 1)

The device for generating plasma according to claim 1, characterized in that the at least one external electrode (11 and 12) is configured as an electrically conductive foil, in particular as perforated and/or structured foil.

### Claim 6 (depends on 1)

The device for generating plasma according to claim 1, characterized in that the spacer element (20) is configured as a mesh, weave, fabric or knitted fabric.

### Claim 7 (depends on 1)

The device for generating plasma according to claim 1, characterized in that the device for generating plasma (1) has a power supply unit, which is configured to apply a low to high frequency high voltage between the at least one external electrode (11, 12) and the high voltage electrode (10).

### Claim 8 (depends on 1)

A system for generating plasma, comprising several devices for generating plasma (1) according to claim 1 as well as one or more power supply units, which are electrically connected to the devices for generating plasma (1).

### Claim 9 (depends on 1)

A method for generating plasma, in which a device for generating plasma according to claim 1, comprising several devices for generating plasma (1) according to claim 1 is provided and an electrical high voltage is applied to the high voltage electrode (10) and the at least one external electrode (11, 12).

### Claim 10 (depends on 1)

The device for generating plasma according to claim 1, wherein the high voltage electrode (10) encloses an area (30) for generating plasma; wherein the area (30) is confined by the first external electrode (11) and the second external electrode (12) respectively positioned on opposite sides normal to the area (30).

### Claim 11 (depends on 1)

A system for generating plasma, comprising several devices for generating plasma (1) according to claim 1 is provided and an electrical high voltage is applied to the high voltage electrode (10) and the at least one external electrode (11, 12).
