Cleaning device for atomizing and spraying liquid in two-phase flow

A cleaning device for atomizing and spraying liquid in two-phase flow for cleaning a wafer positioned on a spin chuck in a cleaning chamber, comprising a nozzle, a liquid intake pipeline, a gas intake pipeline and an atomized particle guiding outlet;

• wherein;
• the nozzle includes:
• a liquid pipe inside the nozzle;
• a gas pipe surrounding the liquid pipe;
• a liquid-gas guiding part disposed at a lower end of the nozzle and provided with multiple liquid bypass pipelines which are connected with the liquid pipe, wherein the liquid bypass pipelines are symmetric with respect to the center of the liquid-gas guiding part;
• an exhaust mesh plate disposed adjacent to the liquid bypass pipelines and connected with the gas pipe;
• wherein each portion of the exhaust mesh plate arranged between each two adjacent liquid bypass pipelines is provided with a plurality of gas guiding outlets oriented in a direction perpendicular to the exhaust mesh plate, and each liquid bypass pipeline is provided with a surface having liquid guiding outlets formed along its length;
• wherein the surface is disposed below the exhaust mesh plate and inclined in a downward direction with respect to the exhaust mesh plate at a predetermined angle from 10 degrees to 80 degrees;
• wherein the liquid guiding outlets and/or the gas guiding outlets are straight tubular shaped, spiral tubular shaped or Laval nozzle structured;
• wherein, the liquid intake pipeline and the gas intake pipeline are both connected to a spray arm and respectively communicated with the liquid pipe and the gas pipe inside the nozzle;
• wherein, the spray arm drives the nozzle to perform an arc-shaped reciprocating motion passing through the center of the wafer;
• wherein, the atomized particle guiding outlet is disposed around and below the liquid-gas guide part;
• the atomized particle guiding outlet has a Laval nozzle structure or an inner wall oriented in the direction perpendicular to the exhaust mesh plate;
• wherein, a liquid sprayed from the liquid guiding outlets and a gas sprayed from the gas guiding outlets collide against each other below the liquid-gas guiding part to form atomized particles which are then sprayed downward to the wafer surface through the atomized particle guiding outlet to perform a reciprocating two-phase flow cleaning process.