Method of forming a deterministic thin film from a crystal substrate by etching a bilayer bonding interface to create a channel

A method of forming a deterministic thin film from a crystal substrate, comprising:

• implanting ions into a surface of the crystal substrate to form a thin film crystal layer;
• bonding the crystal substrate and a handle substrate to form a bilayer bonding interface between the crystal substrate and the handle substrate, wherein the bilayer bonding interface comprises at least two different materials;
• exfoliating the thin film crystal layer from the crystal substrate;
• patterning the thin film crystal layer to define a deterministic thin film;
• etching one or more trenches in the thin film crystal layer;
• etching the at least two different materials of the bilayer bonding interface via the one or more trenches, wherein etching the bilayer bonding interface creates a channel between the at least two different materials;
• and
• releasing the deterministic thin film from the handle substrate.