Method for producing chlorosilane gas using continuous tubular reactor

A method for continuously producing trichlorosilane, comprising:

• reacting a reaction raw material comprising a metal silicon powder dispersed in liquid tetrachlorosilane, with a gaseous reaction raw material, in an apparatus to yield trichlorosilane during flow of the reaction raw material and the gaseous reaction raw material through the apparatus, wherein the apparatus comprises:
• a tubular reactor that is:
• (a) a horizontally-positioned linear tubular reactor containing structures protruding from an inner wall of the tubular reactor to a reaction space that impede the flow of a fluid through the reactor and that cause collision of the fluid during flow of the fluid through the reactor;
• or
• (b) composed of parallel tube segments connected by perpendicular tube segments to form a reactor having a circuitous flow path having a square wave shape with a plurality of right angle bends, whereby each bend impedes flow of fluid through the reactor and causes collision of the fluid during flow of the fluid through the reactor;
• an inlet through which a reaction raw material is introduced into the tubular reactor;
• a cooler connected to the inlet;
• a hole through which a gaseous reaction raw material is fed into the tubular reactor;
• and
• an outlet through which reaction products comprising trichlorosilane exit the tubular reactor.