Imprint apparatus and method of manufacturing article

A method of manufacturing an article, the method comprising:

• forming a pattern on a substrate using an imprint apparatus;
• and
• processing the substrate, on which the pattern has been formed, to manufacture the article,
• wherein the imprint apparatus, which molds an imprint material on a shot region of a substrate by using a mold on which a pattern is formed, includes:
• a detection unit configured to irradiate a first mark of the mold and a second mark of the substrate with first light, detect the first light from the first mark and the second mark, and measure a position deviation between the first mark and the second mark;
• a heating unit configured to irradiate the substrate via the mold with second light for heating, and heat the substrate to deform the shot region;
• and
• a control unit configured to control alignment between the mold and the substrate based on the position deviation measured by the detection unit,
• wherein during the alignment which is controlled by the control unit, the control unit is configured to cause the detection unit to detect the first light and measure the position deviation and the control unit is configured to cause the heating unit to heat the substrate by irradiating the substrate with the second light while the detection unit detects the first light and measures the position deviation, and
• wherein a direction in which the detection unit receives the first light, a numerical aperture of the detection unit, a wavelength of the second light, and a direction of the second light which is incident on the substrate are configured to suppress detection of the second light reflected by at least one of the first mark and the second mark by the detection unit in the alignment during the heating of the substrate.