Micro-nozzle array
AssigneeQueen's University at Kingston
InventorsRichard D. Oleschuk, Yueqiao Fu, Graham Gibson, Timothy Hutama
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Abstract
The invention relates to a micro-nozzle array comprising a plurality of capillaries comprising a first silica-based material and a second silica-based material substantially surrounding the first silica-based material of the plurality of capillaries, and a plurality of nozzles extending beyond a face of the micro-nozzle array, each nozzle corresponding to a single capillary, wherein each nozzle comprises the first silica-based material. The micro-nozzle array may be used in hydrodynamic or electro-osmotic applications. In one embodiment the micro-nozzle array is a multiple electrospray emitter. The invention also relates to methods for preparing and using micro-nozzle arrays.
Claims18
A micro-nozzle array, comprising:
- a plurality of capillaries, each capillary comprising a first silica-based material;
- a second silica-based material, different from the first silica based material, substantially surrounding and contacting the first silica-based material of the plurality of capillaries and filling between the plurality of capillaries;
- a plurality of micro-nozzles extending beyond a face of the micro-nozzle array, each micro-nozzle corresponding to a single capillary;
- wherein each micro-nozzle comprises the first silica-based material;
- wherein the face of the micro-nozzle array comprises the second silica-based material.
A method of preparing a micro-nozzle array, comprising:
- micro-machining a MSF comprising:
- a plurality of capillaries, each capillary comprising a first silica-based material;
- and
- a second silica-based material, different from the first silica based material, substantially surrounding and contacting the first silica-based material of the plurality of capillaries and filling between the plurality of capillaries;
- wherein the micro-machining produces a plurality of micro-nozzles extending beyond a face of the array, each micro-nozzle corresponding to a single capillary;
- wherein each micro-nozzle comprises the first silica-based material;
- wherein the face of the micro-nozzle array comprises the second silica-based material.
Dependencies are inferred from the claim text.