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US 10,297,431 B2Granted
Treating arcs in a plasma process
AssigneeTrumpf Huettinger Sp. Z O. O.
InventorsMarcin Zelechowski, Piotr Lach
Life of this patent
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Abstract
An arc treatment device includes an arc detector operable to detect whether an arc is present in a plasma chamber, an arc energy determiner operable to determine an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber, and a break time determiner operable to determine a break time based on the determined arc energy value.
Claims20
An arc treatment device comprising:
- an arc detector operable to detect whether an arc is present in a plasma chamber;
- an arc energy determiner operable to determine an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber;
- and
- a break time determiner operable to determine a break time based on the determined arc energy value.
1 more element
A method of treating arcs occurring while a plasma process is being carried out in a plasma chamber, the method comprising:
- detecting an arc present in the plasma chamber;
- determining an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber;
- and
- determining a break time based on the determined arc energy value.
1 more element
A plasma process power supply comprising:
- a power output connectable to deliver power to a plasma chamber;
- and
- a controller coupled to the power output and configured to:
- detect a presence of an arc in the plasma chamber;
- in response to detecting the presence of an arc, determine an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber;
- and
- interrupt the power to the plasma chamber for a period of time associated with a break time determined as a function of the determined arc energy value.
4 more elements
Dependencies are inferred from the claim text.