Frequency-characteristics measurement method and positioning control device

A positioning control device comprising:

• a signal applying unit that outputs a sinusoidal signal to a table driving device in a control system, including an x-axis driving mechanism and a y-axis driving mechanism, that moves a table in an x-axis direction and a y-axis direction, the sinusoidal signal being frequency-swept so as to have a frequency region in which at least one of a cycle number and applying duration is different at each frequency;
• a time-series data acquisition unit configured to acquire time-series data of transmission characteristics acquired from the control system by applying the sinusoidal signal to the table driving device to move the table in the x-axis direction and the y-axis direction with the x-axis driving mechanism and the y-axis driving mechanism;
• and
• a spectrum analyzing unit configured to perform spectral analysis of the time-series data acquired from the control system;
• wherein the signal applying unit performs a frequency-sweep so as to have at least one frequency region in which the applying duration of the sinusoidal signal is constant and at least one frequency region in which the applying duration of the sinusoidal signal is different at each frequency.

A positioning control device comprising:

• a signal applying unit that outputs a sinusoidal signal to a table driving device in a control system, including an x-axis driving mechanism and a y-axis driving mechanism, that moves a table in an x-axis direction and a y-axis direction, the sinusoidal signal being frequency-swept so as to have a frequency region in which at least one of a cycle number and applying duration is different at each frequency;
• a time-series data acquisition unit configured to acquire time-series data of transmission characteristics acquired from the control system by applying the sinusoidal signal to the table driving device to move the table in the x-axis direction and the y-axis direction with the x-axis driving mechanism and the y-axis driving mechanism;
• and
• a spectrum analyzing unit configured to perform spectral analysis of the time-series data acquired from the control system;
• wherein the cycle number or the applying duration in the frequency region in which at least one of the cycle number and the applying duration of the sinusoidal signal to be applied to the control system is different at each frequency, is determined based on an indicator of a measurement error.

A frequency-characteristics measurement method comprising:

• applying a sinusoidal signal to a table driving device in a control system, including an x-axis driving mechanism and a y-axis driving mechanism, that moves a table in an x-axis direction and a y-axis direction, the sinusoidal signal being frequency-swept so as to have a frequency region in which at least one of a cycle number and applying duration is different at each frequency;
• acquiring time-series data of transmission characteristics acquired from the control system by applying the sinusoidal signal to the table driving device to move the table in the x-axis direction and the y-axis direction with the x-axis driving mechanism and the y-axis driving mechanism;
• and
• performing spectral analysis of the time-series data acquired from the control system;
• wherein the frequency-sweep is performed so as to have at least one frequency region in which the cycle number of the sinusoidal signal is constant and at least one frequency region in which the cycle number of the sinusoidal signal is different at each frequency.

A frequency-characteristics measurement method comprising:

• applying a sinusoidal signal to a table driving device in a control system, including an x-axis driving mechanism and a y-axis driving mechanism, that moves a table in an x-axis direction and a y-axis direction, the sinusoidal signal being frequency-swept so as to have a frequency region in which at least one of a cycle number and applying duration is different at each frequency;
• acquiring time-series data of transmission characteristics acquired from the control system by applying the sinusoidal signal to the table driving device to move the table in the x-axis direction and the y-axis direction with the x-axis driving mechanism and the y-axis driving mechanism;
• and
• performing spectral analysis of the time-series data acquired from the control system;
• wherein the frequency-sweep is performed so as to have at least one frequency region in which the applying duration of the sinusoidal signal is constant and at least one frequency region in which the applying duration of the sinusoidal signal is different at each frequency.

A frequency-characteristics measurement method comprising:

• applying a sinusoidal signal to a table driving device in a control system, including an x-axis driving mechanism and a y-axis driving mechanism, that moves a table in an x-axis direction and a y-axis direction, the sinusoidal signal being frequency-swept so as to have a frequency region in which at least one of a cycle number and applying duration is different at each frequency;
• acquiring time-series data of transmission characteristics acquired from the control system by applying the sinusoidal signal to the table driving device to move the table in the x-axis direction and the y-axis direction with the x-axis driving mechanism and the y-axis driving mechanism;
• and
• performing spectral analysis of the time-series data acquired from the control system;
• wherein the cycle number or the applying duration in the frequency region in which at least one of the cycle number and the applying duration of the sinusoidal signal to be applied to the control system is different at each frequency, is determined based on an indicator of a measurement error.