Curable composition for imprinting
AssigneeDIC Corporation
InventorsJunji Yamaguchi, Hisashi Tanimoto, Takeshi Ibe, Makoto Yada, Naoto Yagi
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AssigneeDIC Corporation
InventorsJunji Yamaguchi, Hisashi Tanimoto, Takeshi Ibe, Makoto Yada, Naoto Yagi
Estimating the term…
There is provided a curable composition for imprinting containing a polymerizable compound, in which (a) the concentration of a polymerizable group in the polymerizable compound is in the range of 4.3 mmol/g to 7.5 mmol/g, (b) a polymerizable compound X whose Ohnishi parameter is 3.5 or less and ring parameter is 0.35 or greater is contained in the range of 40% by mass to 95% by mass with respect to all the polymerizable compounds, (c) a polymerizable compound C having three or more polymerizable groups is further contained in the range of 5% by mass to 20% by mass with respect to all the polymerizable compounds, and (d) the viscosity of the composition being at 25° C. and in a state of not containing a solvent is in the range of 3 mPa·s to 8,000 mPa·s.
A curable composition for imprinting, comprising:
Dependencies are inferred from the claim text.