Inorganic polarizing plate and production method thereof
AssigneeDexerials Corporation
InventorNaoki Hanashima
Life of this patent
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Abstract
An inorganic polarizing plate, containing: substrate transparent to light of bandwidth for use; and wire grid layer containing metal wires aligned on the substrate with gaps shorter than wavelength of the light, the plate satisfying formulae (1) to (3): 0 nm<(DR−DL) Formula (1); 0 nm<|GR−GL| Formula (2); and 0.90≤SR/SL≤1.30 Formula (3), where DL is distance along thickness direction of the substrate in region RL between one metal wire W and metal wire WL next to W in the wire grid layer, and DR is distance along the thickness direction of the substrate in region RR between W and metal wire WR provided next to W and at opposite side to side where WL is provided; GL is gap between W and WL, and GR is gap between W and WR; and SL is ratio of DL to GL, and SR is ratio of DR to GR.
Claims10
An inorganic polarizing plate, comprising:
- a substrate, which is transparent to light of a bandwidth for use;
- a wire grid layer containing a plurality of metal wires aligned on the substrate with gaps shorter than a wavelength of the light, and
- a metal oxide layer provided between the wire grid layer and the substrate,
- wherein the inorganic polarizing plate satisfies the following formulae (1) to (3):
- 0 nm<(DR−DL) Formula (1)
- 0 nm<|GR−GL| Formula (2)
- 0.90≤SR/SL≤1.30 Formula (3)
- where DL is a distance along a thickness direction of the substrate in a region RL between one metal wire W and a metal wire WL provided next to the metal wire W in the wire grid layer, and DR is a distance along the thickness direction of the substrate in a region RR between the metal wire W and a metal wire WR provided next to the metal wire W and at an opposite side to a side where the metal wire WL is provided, where the region RL is a region between the metal wire W and the metal wire WL provided next to the metal wire W in the wire grid layer, and the region RR is a region between the metal wire W and the metal wire WR provided next to the metal wire W in the wire grid layer,
- where GL is a gap between the metal wire W and the metal wire WL, and GR is a gap between the metal wire W and the metal wire WR, and
- where SL is a ratio of the distance DL to the gap GL, and SR is a ratio of the distance DR to the gap GR;
- and
- wherein Formula (1) is based on a difference between a thickness of the metal oxide layer between the region RR and the substrate, and a thickness of the metal oxide layer between the region RL and the substrate.
Dependencies are inferred from the claim text.