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US 10,295,707 B2Granted
Durability coating for oxide films for metal fluoride optics
AssigneeCorning Incorporated
InventorsGerald Philip Cox, Michael Joseph D'lallo, Jean-Francois Oudard, Jue Wang
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Abstract
A coated metal fluoride optic is provided. The coated metal fluoride optic includes an alkaline earth metal fluoride substrate and a coating disposed on at least one surface of the substrate. The coating includes an adhesion layer comprising a fluoride-containing material, a non-densified intermediate layer deposited on the adhesion layer, and a densified capping layer deposited on the intermediate layer.
Claims13
A coated metal fluoride optic comprising:
- an alkaline earth metal fluoride substrate;
- and
- a coating disposed on at least one surface of the substrate, the coating comprising:
- an adhesion layer comprising a fluoride-containing material;
- a non-densified intermediate layer deposited on the adhesion layer, the non-densified intermediate layer comprising a material selected from the group consisting of SiO2, F—SiO2, Al2O3, F—Al2O3, SiON;
- and
- a densified capping layer deposited on the non-densified intermediate layer, the densified capping layer having the same composition as the non-densified intermediate layer, the densified capping layer differing in density from the non-densified intermediate layer.
4 more elements
Dependencies are inferred from the claim text.