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US 10,295,588 B2Granted
Wafer testing without direct probing
AssigneeXcelsis Corporation
InventorsJavier A. Delacruz, William C. Plants
Life of this patent
Estimating the term…
Abstract
The invention pertains to in-wafer testing of integrated circuits. In particular, it pertains to apparatuses and methods for testing small integrated circuits that have pad sizes and pitches that are too small for using conventional wafer probing technology.
Claims8
A semiconductor wafer, comprising:
- (A) a region comprising a plurality of integrated circuit die locations organized in rows and columns;
- (B) first scribe lines separating the rows of integrated circuit die locations;
- (C) second scribe lines separating the columns of integrated circuit die locations;
- (D) a test integrated circuit die occupying at least one of the integrated circuit die locations, the test integrated circuit die comprising:
- (i) a plurality of probe pads,
- (ii) a master test circuit coupled to the probe pads, and
- (iii) a first routing circuit coupled to the master test circuit, wherein the first routing circuit is configured to be coupled to a routing circuit in at least one adjacent integrated circuit die location;
- (E) a plurality of product integrated circuit dies each occupying one of the integrated circuit die locations, each product integrated circuit die comprising:
- (i) a second routing circuit that is configured to be coupled to at least one routing circuit in an adjacent integrated circuit die location,
- (ii) a slave test circuit coupled to the second routing circuit, and
- (iii) a main circuit coupled to the slave test circuit;
- (F) one or more first conductors configured to electrically couple signals across at least one scribe line between the first routing circuit and the second routing circuit;
- and
- (G) a plurality of second conductors configured to electrically couple at least two power voltage levels across at least one scribe line.
11 more elements
Dependencies are inferred from the claim text.