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US 10,295,476 B1Granted
System and method for multiple mode inspection of a sample
AssigneeApplied Materials Israel Ltd.
InventorsBinyamin Kirshner, Yehiel Kapoano
Life of this patent
Estimating the term…
Abstract
A system and method for multiple mode inspection of a sample. The system includes a radiation source, an objective lens, a bright field detection module, a dark field detection module and optics. The optics, when the system operates at a first mode, is configured to direct the input beam through a first opening, without substantially blocking any part of the input beam, towards a first region of the objective lens. The optics, when the system operates at a second mode, is configured to direct the input beam through a second opening, without substantially blocking any part of the input beam, towards a second region of the objective lens. The first region of the objective lens differs from the second region of the objective lens.
Claims15
A system for multiple mode inspection of a sample, comprising:
- a radiation source that is configured to provide an input beam;
- an objective lens;
- a bright field detection module;
- a dark field detection module;
- and
- optics;
- wherein the optics, when the system operates at a first mode, is configured to direct the input beam through a first opening, without substantially blocking any part of the input beam, towards a first region of the objective lens;
- wherein the optics, when the system operates at a second mode, is configured to direct the input beam through a second opening, without substantially blocking any part of the input beam, towards a second region of the objective lens;
- wherein the first region of the objective lens differs from the second region of the objective lens;
- wherein the objective lens is configured to:
- (a) focus the input beam directed towards the first region of the objective lens onto the sample at a first angle;
- (b) focus the input beam directed towards the second region of the objective lens onto the sample at a second angle;
- wherein the first angle differs from the second angle;
- (c) collect a reflected beam that is reflected from the sample;
- (d) collect one or more scattered beams scattered from the sample;
- (e) direct the reflected beam and the one or more scattered beams towards the optics;
- and
- wherein the optics are configured to direct the reflected beam towards the bright field detection module, and to direct the one or more scattered beams towards the dark field detection module.
15 more elements
A system for multiple mode inspection of a sample, comprising:
- a radiation source that is configured to provide an input beam;
- an objective lens;
- a bright field detection module;
- a dark field detection module;
- and
- optics that are constructed and configured, when at a first mode, to direct the input beam towards a certain region of the objective lens;
- wherein the objective lens is configured to (a) focus the input beam directed towards the certain region of the objective lens onto the sample at a first angle;
- (b) collect a reflected beam that is reflected from the object;
- (c) collect one or more scattered beams scattered from the sample, and (d) direct the reflected beam and the one or more scattered beams towards the optics;
- wherein the optics are configured, when at the first mode, to direct the reflected beam towards the bright-field detection module and to direct the one or more scattered beams towards the dark field detection module;
- wherein the optics are constructed and configured, when at a second mode, to direct the input beam towards another region of the objective lens;
- the other region of the objective lens differs from the certain region of the objective lens;
- wherein the objective lens is configured to (a) focus the input beam directed towards the other region of the objective lens onto the sample at a second angle;
- (b) collect the reflected beam that is reflected from the sample;
- (c) collect the one or more scattered beams scattered from the sample, and (d) direct the reflected beam and the one or more scattered beams towards the optics;
- wherein the optics are configured, when at the second mode, to direct the reflected beam towards the bright-field detection module and to direct the one or more scattered beams towards the dark field detection module.
13 more elements
A method for multiple mode inspection of a sample by a system, the method comprising:
- providing an input beam, by a radiation source of the system;
- directing by optics of the system, when the system operates at a first mode, the input beam through a first opening, without substantially blocking any part of the input beam, towards a first region of an objective lens;
- focusing, by the objective lens of the system, when the system operates at the first mode, the input beam that is directed towards the first region of the objective lens onto the sample at a first angle;
- directing by the optics of the system, when the system operates at a second mode, the input beam through a second opening, without substantially blocking any part of the input beam, towards a second region of the objective lens;
- wherein the first region of the objective lens differs from the second region of the objective lens;
- focusing, by the objective lens of the system, when the system operates at the second mode, the input beam that is directed towards the second region of the objective lens onto the sample at a second angle;
- wherein the first angle differs from the second angle;
- collecting, by the objective lens of the system, when the system operates in the first mode and when the system operates in the second mode, a reflected beam that is reflected from the sample;
- collecting, by the objective lens, when the system operates in the first mode and when the system operates in the second mode, one or more scattered beams that are scattered from the sample;
- directing the reflected beam and the one or more scattered beams towards the optics;
- directing, by the optics, the reflected beam towards a bright field detection module;
- and
- directing, by the optics, the one or more scattered beams towards a dark field detection module.
10 more elements
Dependencies are inferred from the claim text.