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US 10,295,145 B2Granted
Top-emission VCSEL-array with integrated diffuser
AssigneeApple Inc.
InventorsNeil MacKinnon, Weiping Li, Xiaofeng Fan
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Abstract
A radiation source includes a semiconductor substrate, an array of vertical-cavity surface-emitting lasers (VCSELs) formed on the substrate, which are configured to emit optical radiation, and a transparent crystalline layer formed over the array of VCSELs. The transparent crystalline layer has an outer surface configured to diffuse the radiation emitted by the VCSELs.
Claims13
A radiation source, comprising:
- a semiconductor substrate;
- an array of vertical-cavity surface-emitting lasers (VCSELs) formed on the substrate, which are configured to emit optical radiation;
- and
- a crystalline layer formed over the array of VCSELs and having an outer surface patterned to define microlenses arrayed in an irregular pattern and having different, respective optical powers so as to diffuse the radiation emitted by the VCSELs.
1 more element
A method of manufacturing a radiation source, the method comprising:
- forming an array of vertical-cavity surface-emitting lasers (VCSELs) on a semiconductor substrate;
- forming a crystalline layer over the VCSEL array;
- and
- etching an outer surface of the crystalline layer to create a surface structure that comprises microlenses arrayed in an irregular pattern and having different, respective optical powers and thereby diffuses optical radiation emitted by the VCSELs.
1 more element
Dependencies are inferred from the claim text.