Adapter for vacuum-insulated lines
AssigneeEvatec AG
InventorMartin Bless
Life of this patent
Estimating the term…
Abstract
A vacuum adapter for feeding-through vacuum-insulated coolant lines (11, 12, 22, 23) from the surrounding atmosphere into a vacuum processing installation has an intermediate volume (2) which is connected firstly to at least one insulation intermediate space (32, 33) of the vacuum-insulated feed lines and secondly to a vacuum pump. The pump capacity is available at least temporarily for evacuating the insulation intermediate space around the coolant lines (22, 23).
Claims6
Vacuum processing installation with a vacuum room (1) and a vacuum adapter (4), wherein the vacuum adapter (4) is connected to a vacuum room (1), to coolant lines (11, 12, 22, 23) in vacuum-insulated feed lines (30, 31) and a vacuum pump, the vacuum adapter (4) comprising:
- an enclosure defining an intermediate volume (2), the intermediate volume (2) being configured to fluidly connect to an insulation intermediate space (32, 33) of the vacuum-insulated feed lines (30, 31),
- sealing devices (13, 14) disposed in openings in the enclosure, the sealing devices (13, 14) being adapted to fluidly isolate the intermediate volume (2) from the vacuum room (1), wherein the sealing devices (13, 14) are configured to allow the coolant lines (11, 12) to extend through the sealing devices (13, 14), and
- a pump neck (5) formed in the enclosure and configured to fluidly communicate with the intermediate volume (2), the pump neck being adapted to be connected with the vacuum pump (40),
- wherein the sealing devices (13, 14) are configured to provide a thermal barrier between the coolant lines (11, 12) and the enclosure by preventing a direct contact between the coolant lines (11, 12) and the enclosure, and at least one of the sealing devices is a bushing (14) attached to the enclosure and having a projection portion extending into the intermediate volume (2) to define an area around the coolant lines (11, 12) that extends into the intermediate volume (2), the area configured to hinder heat conduction between the coolant lines (11, 12) and the enclosure.
Vacuum processing installation with a vacuum room (1), coolant lines (11, 12, 22, 23) and a vacuum adapter (4), wherein the vacuum adapter (4) is connected to the vacuum room (1), to the coolant lines (11, 12, 22, 23) in vacuum-insulated feed lines (30, 31) and to a vacuum pump, the vacuum adapter (4) comprising:
- an enclosure defining an intermediate volume (2), the intermediate volume (2) being configured to fluidly connect to an insulation intermediate space (32, 33) of the vacuum-insulated feed lines (30, 31),
- sealing devices (13, 14) disposed in the enclosure, the sealing devices (13, 14) being adapted to fluidly isolate the intermediate volume (2) from the vacuum room (1), wherein the sealing devices (13, 14) are configured to allow the coolant lines (11, 12) to extend through the sealing devices (13, 14), and
- a pump neck (5) formed in the enclosure and configured to fluidly communicate with the intermediate volume (2), the pump neck being adapted to be connected with the vacuum pump (40),
- wherein the sealing devices (13, 14) are configured to provide a thermal barrier between the coolant lines (11, 12) and the enclosure by preventing a direct contact between the coolant lines (11, 12) and the enclosure, and at least one of the sealing devices is a bushing (14) attached to the enclosure and having a projection portion extending into the intermediate volume (2) to define an area around the coolant lines (11, 12) that extends into the intermediate volume (2), the area configured to hinder heat conduction between the coolant lines (11, 12) and the enclosure.
Dependencies are inferred from the claim text.