Alumina substrate
AssigneeTDK Corporation
InventorsKazuhito Yamasawa, Atsushi Ohido, Katsumi Kawasaki
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Abstract
An alumina substrate wherein an AlN layer is formed on a surface of the alumina substrate and a rare earth elements-containing layer and/or rare earth elements-containing regions is/are formed in the interior of the AlN layer or in the interface between the AlN layer and the alumina substrate.
Claims12
An alumina substrate wherein an AlN layer is formed on a surface of the alumina substrate and a rare earth elements-containing layer and/or rare earth elements-containing regions is/are formed in the interior of the AlN layer and in an area closer to the surface of the alumina substrate than to an outer surface of the AlN layer, or in the interface between the AlN layer and the alumina substrate.
Dependencies are inferred from the claim text.