Electric field treatment method and electric field treatment device
AssigneeTokyo Electron Limited
InventorHaruo Iwatsu
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Abstract
An electrolytic treatment device that performs a prescribed treatment using ions to be treated that are contained in a treatment liquid, and includes a direct electrode and a counter electrode which are arranged on either side of the treatment liquid, an indirect electrode which forms an electric field in the treatment liquid, and a switch which switches between connection of the indirect electrode to the power source and connection of the indirect electrode to the direct electrode or the counter electrode. The switch connects and applies a voltage across the indirect electrode and the power source, and breaks the connection between the indirect electrode and the power source and connects the indirect electrode to the direct electrode or the counter electrode.
Claims8
An electrolytic treatment method for performing a prescribed treatment using treatment target ions contained in a treatment liquid, the method comprising:
- an arranging step of arranging a direct electrode and a counter electrode with the treatment liquid being interposed therebetween, arranging an indirect electrode configured to form an electric field in the treatment liquid, and arranging a switch configured to perform a switching operation between connection of a power source with the indirect electrode and connection of the direct electrode or the counter electrode with the indirect electrode;
- a treatment target ion migrating step of migrating the treatment target ions contained in the treatment liquid to the counter electrode, by connecting the indirect electrode with the power source and then applying a voltage using the switch;
- and
- a treatment target ion treatment step of oxidizing or reducing the treatment target ions migrated to the counter electrode, by disconnecting the indirect electrode from the power source and connecting the indirect electrode to the direct electrode or the counter electrode using the switch.
An electrolytic treatment device that performs a prescribed treatment using treatment target ions contained in a treatment liquid, the device comprising:
- a direct electrode and a counter electrode arranged such that the treatment liquid is interposed therebetween;
- an indirect electrode configured to form an electric field in the treatment liquid;
- and
- a switch configured to perform a switching operation between connection of a power source with the indirect electrode and connection of the direct electrode or the counter electrode with the indirect electrode,
- wherein the switch connects the indirect electrode with the power source and applies a voltage, and
- the switch disconnects the indirect electrode from the power source, and connects the indirect electrode with the direct electrode or the counter electrode.
Dependencies are inferred from the claim text.