Method of creating boron comprising layer
AssigneeUchicago Argonne, LLC
InventorsAnil U. Mane, Jeffrey W. Elam
Life of this patent
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Abstract
A method for forming boron (B) containing Al2O3 composite layers includes (a) reacting a substrate surface with an aluminum-containing precursor to form a first monolayer, (b) purging excess aluminum-containing precursor and reaction by-product, (c) reacting the first monolayer with a second precursor, and (d) purging excess second precursor and reaction by-product, such that steps (a) to (d) constitute one cycle, the composite layers being formed after a plurality of cycles, and the resultant composite layers have a chemical formula of BxAl2−xO3, where x varies in the range of 0 and 2.
Claims20
A method for forming boron (B) containing Al2O3 composite layers, comprising:
- (a) reacting a substrate surface with an aluminum-containing precursor to form a first monolayer;
- (b) purging excess aluminum-containing precursor and reaction by-product;
- (c) reacting the first monolayer with a boron-containing precursor to form a boron-containing surface;
- and
- (d) purging excess boron-containing precursor and reaction by-product,
- wherein steps (a) to (d) constitute one cycle, the composite layers being formed after a plurality of cycles, and
- wherein the resultant composite layers have a chemical formula of BxAl2−xO3, where x varies in the range of greater than 0 and less than 2.
A method for forming boron (B) containing Al2O3 composite layers, comprising:
- (a) reacting a substrate surface with an aluminum-containing precursor to form a first monolayer;
- (b) purging excess aluminum-containing precursor and reaction by-product;
- (c) reacting the first monolayer with a second precursor, the second precursor comprising a boron-containing component and an alcohol compound component;
- and
- (d) purging excess second precursor and reaction by-product,
- wherein steps (a) to (d) constitute one cycle, the composite layers being formed after a plurality of cycles, and
- wherein the resultant composite layers have a chemical formula of BxAl2−xO3, where x varies in the range of greater than 0 and less than 2.
A method for forming boron (B) containing Al2O3 composite layers, comprising:
- (a) reacting a substrate surface with an aluminum-containing precursor to form a first monolayer;
- (b) purging excess aluminum-containing precursor and reaction by-product;
- (c) reacting the first monolayer with a second precursor, the second precursor comprising a boron-containing component and an oxygen-containing component;
- and
- (d) purging excess second precursor and reaction by-product,
- wherein steps (a) to (d) constitute one cycle, the composite layers being formed after a plurality of cycles, and
- wherein the resultant composite layers have a chemical formula of BxAl2−xO3, where x varies in the range of greater than 0 and less than 2.
Dependencies are inferred from the claim text.