High-conductance, non-sealing throttle valve with projections and stop surfaces

A substrate processing system, comprising:

• a process chamber having an outlet;
• a gas delivery system that delivers a first precursor gas into the process chamber during a first period to deposit film on a substrate located within the process chamber;
• a throttle valve that is connected to the outlet of the process chamber and that includes a throttle plate having projections,
• wherein the projections are configured to, during closing of the throttle valve, cut through debris coating an inner surface of the throttle valve due to buildup of the first precursor gas;
• and
• a vacuum pump that removes reactants from the process chamber through the throttle valve.

A non-sealing throttle valve, comprising:

• a throttle body including a housing having an inner surface, wherein the throttle body includes first and second stop surfaces arranged on the inner surface, the first and second stop surfaces having triangular cross-sections;
• a shaft that rotates about an axis and that is rotatable relative to the housing;
• a throttle plate rotatable inside the housing of the throttle body about the shaft between a closed position and an open position and that includes:
• a first projection that has a triangular cross-section to cut through debris on the inner surface and that is located on a first surface of the throttle plate adjacent to a radially outer end of the throttle plate,
• wherein the first projection extends outwardly from the first surface of the throttle plate in a first direction that is perpendicular to the first surface and contacts the first stop surface when the throttle valve is closed;
• and
• a second projection that has a triangular cross-section to cut through debris on the inner surface and that is located on a second surface of the throttle plate adjacent to a radially outer end of the throttle plate,
• wherein the second surface is opposite the first surface and, when the throttle plate is in the closed position, the first and second surfaces are perpendicular to a flow direction through the housing, and
• wherein the second projection extends outwardly from the second surface of the throttle plate in a second direction that is perpendicular to the second surface and that contacts the second stop surface when the throttle valve is closed.