SiC-coated carbon composite material
AssigneeIbiden Co., Ltd.
InventorsYasutaka Koga, Masatoshi Okuda
Life of this patent
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Abstract
Provided is a SiC-coated carbon composite material including a graphite base material and a CVD-SiC coating covering the graphite base material. A porosity of a core part of the graphite base material is 12 to 20%, and a SiC-infiltrated layer extending from the CVD-SiC coating is included in a periphery of the core part of the graphite base material. The SiC-infiltrated layer is constituted of a plurality of regions arranged such that Si content becomes smaller stepwise in an order from a first surface on the CVD-SiC coating side toward a second surface on the graphite base material side.
Claims5
A SiC-coated carbon composite material comprising:
- a graphite base material;
- and
- a CVD-SiC coating covering the graphite base material,
- wherein a porosity of a core part of the graphite base material is 12 to 20%,
- wherein a SiC-infiltrated layer extending from the CVD-SiC coating is included in a periphery of the core part,
- wherein the SiC-infiltrated layer is constituted of a plurality of regions arranged such that Si content becomes smaller stepwise in an order from a first surface on the CVD-SiC coating side toward a second surface on the graphite base material side,
- wherein all of the SiC included in the SiC-coated carbon composite material is formed by CVD method,
- wherein the SiC-infiltrated layer includes SiC which is deposited inside pores of the graphite base material,
- wherein the SiC-infiltrated layer has the thickness of 300 μm or more, and
- wherein the porosity of the core part is 15 to 17%.
A SiC-coated carbon composite material comprising:
- a graphite base material in which a porosity of a core part thereof is 12 to 20%;
- and
- a CVD-SiC coating covering the graphite base material,
- wherein a SiC-infiltrated layer extending from the CVD-SiC coating is included in a periphery of the core part,
- wherein the SiC-infiltrated layer is constituted of a first region arranged on the CVD-SiC coating side and a second region arranged on the graphite base material side and having a smaller Si content than that of the first region,
- wherein all of the SiC included in the SiC-coated carbon composite material is formed by CVD method,
- wherein the SiC-infiltrated layer includes SiC which is deposited inside pores of the graphite base material,
- wherein the SiC-infiltrated layer has the thickness of 300 μm or more, and
- wherein the porosity of the core part is 15 to 17%.
Dependencies are inferred from the claim text.