Apparatus and method to reduce and control resistivity of deionized water
AssigneeVeeco Precision Surface Processing LLC
InventorsJohn Taddei, Jonathan Yutkowitz
Life of this patent
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Abstract
An apparatus and method to convert high resistivity (18 MOhm/cm) deionized water into lower resistivity deionized water with a tight resistivity range. The apparatus is diminished in size to require less space, has an improved sensitivity resistivity probe to permit a lower operating range, an increased communication rate with updated control logic to permit holding tighter tolerances. The method is environmentally friendly in that it replaces the use of harsh chemistries and eliminates the generation of hazardous waste.
Claims19
An apparatus for reducing a resistivity of a first fluid comprising:
- a vessel;
- a bottom cap that is detachably coupled to an open end of the vessel so as to close off the open end and the bottom cap includes an integral manifold structure that has a first inlet formed integrally therein for receiving the first fluid;
- a second inlet formed integrally therein for selectively delivering a second fluid to the vessel for mixing with the first fluid to reduce the resistivity of the first fluid;
- and an outlet formed integrally therein for discharging the first fluid from the vessel;
- and
- a resistivity sensor that is received within the manifold of the bottom cap such that one end of the resistivity sensor is disposed within the outlet for measuring the resistivity of the first fluid being discharged from the vessel.
A method for reducing resistivity of a first fluid comprising the steps of:
- delivering the first fluid through a first inlet to an interior of a vessel;
- selectively delivering a second fluid through a second inlet to the vessel for mixing with the first fluid to cause a reduction in the resistivity of the first fluid;
- measuring the resistivity of the first fluid in the vessel and controlling the delivery of the second fluid to the vessel based on measured resistivity values;
- and
- discharging the first fluid from the vessel through an outlet associated therewith when the resistivity value of the first fluid is at a predetermined target value or within a predetermined target range;
- wherein the first inlet, the second inlet and the outlet are integrally formed in a body of a bottom cap that is mated to an open end of the vessel to close off the vessel and the resistivity is measured by a resistivity sensor that has an exposed distal tip that is disposed within the outlet in contact with the first fluid contained in the vessel and is securely attached to the bottom cap.
Dependencies are inferred from the claim text.