Method for manufacturing gas detector by MEMS process

A method for manufacturing a multi-gas detector by a micro-electrical-mechanical systems (MEMS) process, comprising:

• P1:
• providing a MEMS wafer, the MEMS wafer comprising a plurality of mutually adjacent detection modules, each of the plurality of detection modules comprising a plurality of units, each of the plurality of units comprising a top portion, a side block portion extending from an edge of the top portion, and a bottom chamber formed by the top portion and the side block portion in a surrounding manner, the side block portions of the plurality of units mutually connected;
• P2:
• forming a gas sensing material layer on one side of the MEMS wafer opposing to the bottom chamber, the gas sensing material layer comprising a plurality of types of gas sensing materials respectively formed on the plurality of units;
• P3:
• bonding a structure reinforcing layer with the MEMS wafer through anode bonding in a negative-pressure environment, wherein the structure reinforcing layer covers the bottom chambers, and is made of at least one selected from a group consisting of glass and borosilicate glass;
• P4:
• providing an adhesive tape on one side of the structure reinforcing layer opposing to the MEMS wafer;
• P5:
• performing a cutting process along connecting positions of the plurality of detection modules, and simultaneously on the structure reinforcing layer and the adhesive tape to form a plurality of multi-gas detection units;
• and
• P6:
• adhering one of the plurality of multi-gas detection units to a substrate by the adhesive tape to form a multi-gas detector.