Micromechanical sensor and method for producing a micromechanical sensor
AssigneeRobert Bosch GmbH
InventorsBenny Pekka Herzogenrath, Johannes Classen
Life of this patent
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Abstract
A micromechanical sensor that is produced surface-micromechanically includes at least one mass element formed in a third functional layer that is non-perforated at least in certain portions. The sensor has a gap underneath the mass element that is formed by removal of a second functional layer and at least one oxide layer. The removal of the at least one oxide layer takes place by introducing a gaseous etching medium into a defined number of etching channels arranged substantially parallel to one another. The etching channels are configured to be connected to a vertical access channel in the third functional layer.
Claims15
A micromechanical sensor configured to be produced surface-micromechanically, comprising:
- a third functional layer defining at least one movable mass element that includes:
- a first portion that is at least substantially unperforated;
- and
- a second portion that is perforated;
- wherein:
- the third functional layer is positioned so as to form a first gap located underneath the first portion , and a second gap located underneath the second portion;
- and
- the first gap is about two to about ten times greater than the second gap.
A micromechanical device configured to be produced surface-micromechanically, comprising:
- a third functional layer that defines a vertical slot;
- at least one oxide layer positioned underneath the third functional layer;
- and
- a second functional layer positioned underneath the third functional layer and including at least one horizontal etching channel in communication with the vertical slot such that introducing gaseous etching material into the at least one horizontal etching channel via the vertical slot removes the at least one oxide layer and the second functional layer from the device and forms a first gap underneath the third functional layer.
Dependencies are inferred from the claim text.