Bonding material composition, aluminum nitride bonded body, and method for producing the same
AssigneeNGK Insulators, Ltd.
InventorsMasashi Goto, Noboru Nishimura, Yuji Katsuda
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Abstract
A first bonding material composition according to the present invention is a bonding material composition used when aluminum nitride sintered bodies containing a rare-earth metal oxide are bonded to each other, in which the bonding material composition contains, in addition to an O element-containing aluminum nitride raw material, (a) as a fluorine compound, at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal, or (b) as a fluorine compound, at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal, and a rare-earth metal oxide.
Claims7
An aluminum nitride bonded body in which aluminum nitride sintered bodies formed from aluminum nitride powder are bonded to each other with a bonding layer,
- wherein the bonding layer contains, as a crystal phase, AlN and at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal.
An aluminum nitride bonded body in which aluminum nitride sintered bodies are bonded to each other with a bonding layer,
- wherein the aluminum nitride sintered bodies have reaction layers at interfaces with the bonding layer, the reaction layers being formed by a reaction of an oxide contained in a aluminum nitride sintered bodies and a fluorine compound contained in a bonding material composition before the formation of the bonding layer, and
- the bonding layer contains, as a crystal phase, AlN and at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal.
Dependencies are inferred from the claim text.