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US 10,293,459 B2Granted
Polishing pad having polishing surface with continuous protrusions
AssigneeCabot Microelectronics Corporation
InventorsPaul Andre Lefevre, William C. Allison, Alexander William Simpson, Diane Scott, Ping Huang, Leslie M. Charns, James Richard Rinehart, Robert Kerprich
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Abstract
Polishing pads having a polishing surface with continuous protrusions are described. Methods of fabricating polishing pads having a polishing surface with continuous protrusions are also described.
Claims23
A polishing pad for polishing a substrate, the polishing pad comprising:
- a polishing body having a polishing side opposite a back surface;
- and
- a polishing surface comprising a plurality of protrusions continuous with the polishing side of the polishing body, each protrusion having a modified-quadrilateral polygon shape in a plane of the polishing surface, wherein the plurality of protrusions is arranged in an X-Y grid pattern, wherein the polishing body and polishing surface are together homogeneous and unitary, and wherein the polishing body and polishing surface comprise a molded polyurethane material, and further comprising:
- a solid ring encompassing the plurality of protrusions at an outer most edge of the polishing side of the polishing body, the solid ring continuous with the polishing side of the polishing body, wherein a continuous groove is disposed between the solid ring and the plurality of protrusions.
1 more element
Dependencies are inferred from the claim text.