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US 10,293,458 B2Granted
Composite ceramic abrasive polishing solution
Assignee3M Innovative Properties Company
InventorsPaul S Lugg, Duy K Lehuu
Life of this patent
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Abstract
A polishing solution includes a fluid component and a plurality of ceramic abrasive composites. The ceramic abrasive composites include individual abrasive particles uniformly dispersed throughout a porous ceramic matrix. At least a portion of the porous ceramic matrix includes glassy ceramic material. The ceramic abrasive composites are dispersed in the fluid component.
Claims14
A polishing solution comprising:
- a fluid component;
- and
- a plurality of ceramic abrasive composites, the ceramic abrasive composites comprising individual abrasive particles uniformly dispersed throughout a porous ceramic matrix;
- wherein at least a portion of the porous ceramic matrix comprises glassy ceramic material;
- wherein the ceramic abrasive composites are dispersed in the fluid component;
- and
- wherein the fluid component comprises ethylene glycol, propylene glycol, glycerol, or oligomers of ethylene glycol;
- and
- wherein the fluid component comprises a non-aqueous fluid in an amount of at least 50% by weight.
6 more elements
A method of polishing a substrate, the method comprising:
- providing a polishing pad;
- providing a substrate having a major surface to be polished;
- and
- contacting said surface with the polishing pad and a polishing solution while there is relative motion between the polishing pad and the substrate;
- wherein the polishing solution comprises:
- a fluid component;
- and
- a plurality of ceramic abrasive composites, the ceramic abrasive composites comprising individual abrasive particles uniformly dispersed throughout a porous ceramic matrix;
- wherein at least a portion of the porous ceramic matrix comprises glassy ceramic material;
- wherein the ceramic abrasive composites are dispersed in the fluid component;
- and
- wherein the fluid component comprises ethylene glycol, propylene glycol, glycerol, or oligomers of ethylene glycol;
- and
- wherein the fluid component comprises a non-aqueous fluid in an amount of at least 50% by weight.
11 more elements
A polishing system comprising a polishing pad and a polishing solution, wherein the polishing solution comprises:
- a fluid component;
- and
- a plurality of ceramic abrasive composites, the ceramic abrasive composites comprising individual abrasive particles uniformly dispersed throughout a porous ceramic matrix;
- wherein at least a portion of the porous ceramic matrix comprises glassy ceramic material;
- wherein the ceramic abrasive composites are dispersed in the fluid component;
- and
- wherein the fluid component comprises ethylene glycol, propylene glycol, glycerol, or oligomers of ethylene glycol;
- and
- wherein the fluid component comprises a non-aqueous fluid in an amount of at least 50% by weight.
6 more elements
Dependencies are inferred from the claim text.