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US 10,293,377 B2Granted
Micromachined ultrasonic transducers with a slotted membrane structure
AssigneeChirp Microsystems, Inc.
InventorsAndre Guedes, David Horsley, Meng-Hsiung Kiang, Richard Przybyla, Stefon Shelton
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Abstract
A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency.
Claims48
A piezoelectric micromachined ultrasonic transducer (PMUT) device, comprising:
- a substrate having an open cavity;
- and
- a membrane attached to the substrate over the opening, a portion of the membrane that overlies the open cavity being divided into a plurality of cantilevers wherein the cantilevers are mechanically coupled by one or more interruptions in gaps between adjacent cantilevers so that the cantilevers resonate at a common frequency, wherein the one or more interruptions are located between a perimeter of the open cavity and a center of the open cavity.
A method for fabricating a piezoelectric micromachined ultrasonic transducer (PMUT) device, comprising:
- forming a membrane attached to a substrate;
- dividing a portion of the membrane into a plurality of cantilevers that are mechanically coupled;
- and
- forming an opening through a portion of the substrate underling the plurality of cantilevers to release the cantilevers, wherein the cantilevers are mechanically coupled by one or more interruptions in gaps between adjacent cantilevers so that the cantilevers resonate at a common frequency, wherein the one or more interruptions are located between a perimeter of the open cavity and a center of the open cavity.
1 more element
Dependencies are inferred from the claim text.