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US 10,293,374 B2Granted
Capacitive transducer and method of manufacturing same
AssigneeCanon Kabushiki Kaisha
InventorsKazutoshi Torashima, Kenichi Nagae
Life of this patent
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Abstract
Provided is a capacitive transducer including an element including a plurality of cells supported such that a vibrating membrane including one of a pair of electrodes formed with an gap inbetween is capable of vibration, wherein a distance between a pair of electrodes of a cell in an end portion of the element is greater than that between a pair of electrodes of a cell in a middle portion of the element.
Claims7
A capacitive transducer comprising:
- an element including a plurality of cells, the element having an end portion and a middle portion, and having at least one of the cells in the end portion and at least one of the cells in the middle portion;
- wherein each cell has a first electrode and a second electrode which is included by a vibrating membrane,
- wherein the first electrode and the second electrode are formed separated by a distance, and
- wherein a shape of the element is rectangular having a pair of long sides and a pair of short sides, and, in a direction along a long side, the distance between the first electrode and the second electrode in the at least one cell in the end portion is greater than the distance between the first electrode and the second electrode in the at least one cell in the middle portion of the element.
1 more element
Dependencies are inferred from the claim text.