Polysilicon manufacturing apparatus

A polysilicon manufacturing apparatus, comprising:

• a reactor disposed on a base plate to form a reaction chamber;
• a pair of electrical feedthroughs installed on the base plate to be extended to the inside of the reaction chamber;
• rod filaments installed on the electrical feedthroughs in the reaction chamber and connected to each other by a rod bridge at the upper end to form a silicon rod by chemical vapor deposition of source gas introduced to a gas inlet;
• and
• a cooling jacket inserted to an installation hole provided at the upper side of the reactor to be supported by the base plate,
• wherein the cooling jacket has a gas passage connected to a gas outlet formed on the base plate, the gas passage discharges the gas after reaction,
• wherein the cooling jacket has a coolant passage introducing and circulating a low-temperature coolant from the outside of the reactor, the coolant passage is formed at the outside of the gas passage to discharge a high-temperature coolant to the outside of the reactor,
• wherein the cooling jacket includes a coolant inlet installed in the reactor and connected to the coolant passage to introduce a low-temperature coolant, and
• a coolant outlet connected to the coolant passage to discharge a high-temperature coolant, and
• wherein the coolant inlet and the coolant outlet are extended from the coolant passage to outside of the reactor through the installation hole.