Optical examination method and optical examination device

A method of performing an optical examination on a test object, the method comprising:

• (a) obtaining, for each of a plurality of optical models that simulate the test object, a first detection light quantity distribution, by performing a simulation, by a processor executing a program of instructions stored in a non-transitory medium, of virtual measurements with an optical sensor including an irradiation system and a detection system, the irradiation system including at least one light irradiator, and the detection system including at least one photodetector to detect an amount of light that returns to the optical sensor from the test object after having been emitted from the irradiation system to a surface of the test object and propagated inside the test object;
• (b) obtaining a second detection light quantity distribution that is a distribution of an amount of light detected, by physical measurements using the optical sensor, on the test object, including
• (b1) emitting a plurality of light rays that are not parallel to each other from the light irradiator to an identical point of the test object, and
• (b2) detecting, using the photodetector, each of amounts of a plurality of light rays that have propagated through the test object to output a plurality of detection values of the photodetector;
• (c) determining, by the processor based on the first light quantity distribution and the second detection light quantity distribution, an optical model most similar to the test object amongst the plurality of optical models, by using a ratio of the plurality of detection values of the photodetector;
• and
• (d) performing, based on the optical model determined in (c), at least one of the following:
• (i) adjusting the second detection light quantity distribution corresponding to the physical measurements using the optical sensor;
• (ii) adjusting the amount of light that is emitted from the irradiation system of the optical sensor;
• (iii) adjusting the amount of detection light detected by the detection system of the optical sensor;
• (iv) adjusting internal information of the test object determined based on the second detection light quantity distribution.