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US 10,290,487 B2Granted
Transmission window for a vacuum ultraviolet gas discharge lamp
AssigneeInternational Iberian Nanotechnology Laboratory
InventorPieter De Beule
Life of this patent
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Abstract
A transmission window (1) for a VUV gas discharge lamp is defined which comprises a substrate (3) which is transparent to the VUV spectrum and a nanolayer stack (2) provided on the substrate, the nanolayer stack (2) comprising at least one nanolayer and the top layer of the nanolayer stack being electrically conducting. Also, a VUV gas discharge lamp, a photo-ionization device and a photo-ionization detector comprising said transmission window are defined.
Claims20
A vacuum ultraviolet (VUV) gas discharge lamp comprising:
- a glass enclosure containing a low pressure gas;
- and
- a VUV transmission window, wherein the VUV transmission window comprises:
- a VUV-transparent substrate, and
- a nanolayer stack adjacent to the VUV-transparent substrate wherein the nanolayer stack comprises at least one nanolayer, and at least a top nanolayer of the nanolayer stack is conductive,
- wherein the top nanolayer comprises at least two regions, the at least two regions comprise a first region and a second region, the first region is comprised of a first conductive material, the second region is comprised of a second conductive material, the first and second conductive materials are different, and the first and second regions are electrically isolated from one another.
3 more elements
Photo-ionization device, comprising:
- a glass enclosure containing a low pressure gas;
- a VUV transmission window, wherein the VUV transmission window comprises:
- a VUV-transparent substrate, and
- a nanolayer stack adjacent to the VUV-transparent substrate, wherein the nanolayer stack comprises at least one nanolayer, and at least a top nanolayer of the nanolayer stack is conductive, wherein the top nanolayer comprises at least two regions, the at least two regions comprise a first region and a second region, the first region is comprised of a first conductive material, the second region is comprised of a second conductive material, the first and second conductive materials are different, and the first and second regions are electrically isolated from one another;
- and
- an excitation device configured to excite the low pressure gas contained in the glass enclosure.
3 more elements
Dependencies are inferred from the claim text.