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US 10,290,463 B2Granted
Compact deflecting magnet
AssigneeImatrex, Inc.
InventorsRoy E. Rand, Vitaliy Ziskin
Life of this patent
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Abstract
A particle beam device including a magnet, the device including: a particle beam source configured to emit electron and ion beams; a plurality of yokes arranged in a substantially rectangular shape; a coil set including a plurality of coils, wherein windings of the plurality of coils are uniformly distributed across and wound around the plurality of yokes, wherein the coil set is configured to produce both dipole and quadrupole fields, wherein the magnet is configured to deflect and focus electron and ion beams.
Claims21
A particle beam device including a magnet, the device comprising:
- a particle beam source configured to emit electron and ion beams;
- a plurality of yokes arranged in a substantially rectangular shape;
- a coil set including a plurality of coils,
- wherein windings of the plurality of coils are uniformly distributed across and wound around the plurality of yokes,
- wherein the coil set is configured to produce both dipole and quadrupole fields,
- wherein the magnet is configured to deflect and focus electron and ion beams.
3 more elements
A magnet comprising:
- a plurality of yokes arranged in a substantially rectangular shape;
- a coil set including a plurality of coils,
- wherein windings of the plurality of coils are uniformly distributed across and wound around the plurality of yokes,
- wherein the coil set is configured to produce both dipole and quadrupole fields.
1 more element
Dependencies are inferred from the claim text.