Management apparatus, substrate processing system and non-transitory computer-readable recording medium

A management apparatus for improving processing efficiency of a substrate, the apparatus connected to a plurality of substrate processing devices, each of the plurality of substrate processing devices stores device information for processing a substrate including at least a control parameter including a pressure parameter, a temperature parameter and a gas flow rate parameter used for a substrate processing recipe, the management apparatus comprising:

• a memory that stores:
• device information stored in a file including a recipe file storing a substrate processing recipe and a parameter file selected from a group including the pressure parameter, the temperature parameter and the gas flow rate parameter;
• and a device information identifier (ID) for identifying the device information;
• a manipulation & display that receives a command and display the device information;
• a communication network that communicates with the plurality of substrate processing devices;
• and
• a controller that executes a device information update program for comparing the file and updating the device information stored as the file,
• wherein the controller:
• (a) sets a master file including the recipe file and the parameter file stored in a first one of the plurality of substrate processing devices;
• (b) obtains second device information including the control parameter stored as a second file having same name as the master file from a second one of the plurality of substrate processing devices other than the first one of the plurality of substrate processing devices based on a reference device information including the control parameter;
• (c) displays the reference device information and a difference between the second device information and the reference device information on the manipulation & display;
• (d) generates modified device information including the control parameter by modifying the second device information when a command for modifying the difference is received from the manipulation & display;
• and (e) transmits the modified device information including the control parameter to the second one of the plurality of substrate processing devices,
• wherein, in (c), the controller:
• compares the reference device information including the control parameter stored in the master file with the second device information including the control parameter stored in the second file with the same name as the master file;
• displays a matching portion between the reference device information and the second device information as a blank space on the manipulation & device;
• and displays a different portion between the reference device information and the second device information on the manipulation & device.