Miniature fluid control device and piezoelectric actuator thereof

A miniature fluid control device, comprising:

• a piezoelectric actuator comprising a suspension plate, an outer frame, four brackets and a piezoelectric ceramic plate, wherein the suspension plate has a square shape and has a first surface and an opposing second surface, a bulge is formed on the second surface of the suspension plate, the outer frame is arranged around the suspension plate and has a first surface and an opposing second surface, and the suspension plate and the outer frame are connected with each other through the brackets, wherein the second surface of the outer frame and the second surface of the suspension plate are coplanar with each other, a maximum length of the piezoelectric ceramic plate is equal to or less than a length of a side of the square shape of the suspension plate, and the piezoelectric ceramic plate is attached on the first surface of the suspension plate, wherein each bracket has a length in a range between 1.11 mm and 1.21 mm and a width in a range between 0.2 mm and 0.6 mm;
• and
• a housing comprising a gas collecting plate and a base, wherein the gas collecting plate is a frame body having a bottom plate and a sidewall structure to form an accommodation space, and the piezoelectric actuator is disposed within the accommodation space, wherein the base comprises a gas inlet plate and a resonance plate, and the base is disposed within the accommodation space to seal the piezoelectric actuator, wherein the gas inlet plate comprises at least one inlet, at least one convergence channel and a convergence chamber, wherein the resonance plate is fixed on the gas inlet plate and has a central aperture corresponding to the convergence chamber of the gas inlet plate and the bulge of the suspension plate, wherein an adhesive layer is arranged between the second surface of the outer frame of the piezoelectric actuator and the resonance plate, so that a depth of a compressible chamber between the piezoelectric actuator and the resonance plate is maintained.