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US 10,276,355 B2Granted
Multi-zone reactor, system including the reactor, and method of using the same
AssigneeASM IP Holding B.V.
InventorsCarl Louis White, Mohith Verghese, Eric James Shero, Todd Robert Dunn
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Abstract
Multi-zone reactors, systems including a multi-zone reactor, and methods of using the systems and reactors are disclosed. Exemplary multi-zone reactors include a movable susceptor assembly and a moveable plate. The movable susceptor assembly and movable plate can move vertically between reaction zones of a reactor to expose a substrate to multiple processes or reactants.
Claims27
A multi-zone gas-phase reactor comprising:
- a plurality of vertically-stacked reaction zones comprising a first reaction zone and a second reaction zone, wherein each reaction zone comprises a gas inlet on a first side of the multi-zone gas-phase reactor and an exhaust outlet on a second side of the multi-zone gas-phase reactor;
- a moveable top plate comprising a bottom surface;
- and
- a movable susceptor assembly comprising a susceptor having a top surface,
- wherein a movable processing region comprises the bottom surface, the top surface and one or more reaction zones,
- wherein the moveable top plate and the susceptor assembly are each configured to move independently in a vertical direction within the multi-zone gas-phase reactor during processing of a substrate, and
- wherein the substrate is disposed on the top surface and is exposed to a first process in the first reaction zone and a second process in the second reaction zone.
4 more elements
Dependencies are inferred from the claim text.