Pumping method in a system of vacuum pumps and system of vacuum pumps

Abstract

The present invention relates to a pumping method in a pumping system (SP) comprising: a primary dry screw-type vacuum pump (3) with a gas entry orifice (2) connected to a vacuum chamber (1) and a gas exit orifice (4) leading into a conduit (5) before coming out into the gas outlet (8) of the pumping system (SP), a non-return valve (6) positioned in the conduit (5) between the gas exit orifice (4) and the gas outlet (8), and an ejector (7) connected in parallel to the non-return valve (6). According to this method, the primary dry screw-type vacuum pump (3) is put into operation in order to pump the gases contained in the vacuum chamber (1) through the gas exit orifice (4); in a simultaneous way, the ejector (7) is fed with working fluid, and the ejector (7) continues to be fed with working fluid all the time that the primary dry screw-type vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the time that the primary dry screw-type vacuum pump (3) maintains a defined pressure in the vacuum chamber (1). The present invention also relates to a pumping system (SP) able to be used for implementing this method.

Dependencies are inferred from the claim text.