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US 10,259,703 B2Granted
Method for making an actuator based on carbon nanotubes
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsHe Ma, Yang Wei, Kai Liu, Kai-Li Jiang, Shou-Shan Fan
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Abstract
The disclosure relates to a method for making an actuator based on carbon nanotubes. The method includes: providing a carbon nanotube layer; depositing a vanadium oxide (VOx) layer on the carbon nanotube layer; and annealing the VOx layer in an oxygen atmosphere to form a vanadium dioxide layer (VO2) layer. Because the drastic reversible phase transition of VO2, the actuator has giant deformation amplitude and fast response.
Claims15
A method for making an actuator, the method comprising:
- providing a carbon nanotube (CNT) layer;
- applying a vanadium oxide (VOx) layer on the carbon nanotube layer to form a VOx/CNT composite;
- and
- annealing the VOx/CNT composite in an oxygen atmosphere to obtain a vanadium dioxide (VO2) layer on the carbon nanotube layer.
1 more element
Dependencies are inferred from the claim text.