Embedded air gap transmission lines
AssigneeGoogle Inc.
InventorsRichard Roy, Pierre-luc Cantin, Teckgyu Kang, Woon Seong Kwon
Life of this patent
Estimating the term…
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AssigneeGoogle Inc.
InventorsRichard Roy, Pierre-luc Cantin, Teckgyu Kang, Woon Seong Kwon
Estimating the term…
Embedded air gap transmission lines and methods of fabrication are provided. An apparatus having an air gap transmission line can include a first conductive plane, a core dielectric layer having a bottom surface in contact with the first conductive plane, a conductor having a bottom surface in contact with a top surface of the core dielectric layer, and a second conductive plane positioned over, and spaced apart from, a top surface of the conductor such that a gap separates the conductor from the second conductive plane. The top surface of the conductor is separated from the bottom surface of the second conductive plane by a first distance measured along an axis normal to the first conductive plane, and the bottom surface of the conductor is separated from the first conductive plane by a second distance greater than the first distance measured along the axis.
An apparatus comprising:
A method of fabricating an apparatus comprising:
Dependencies are inferred from the claim text.