MEMS and/or NEMS dynamic pressure sensor with improved performances and microphone comprising such a sensor
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorLoic Joet
Life of this patent
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Abstract
Dynamic pressure sensor of MEMS and/or NEMS type comprising a support and a rigid sensitive element anchored to the support by at least one anchoring zone, said sensitive element comprising a parallel first and a second face intended to be subjected to different pressures, said sensitive element being capable of having an out-of-plane displacement with respect to the support in a detection direction under the effect of a pressure difference, the pressure sensor also comprising a detector of a force applied to the sensitive element by the pressure difference.
Claims23
A dynamic pressure sensor of MEMS and/or NEMS type comprising:
- a support;
- at least one rigid sensitive element anchored to the support at a level of at least one anchoring zone, said sensitive element comprising parallel first and second faces to be subjected to pressures, said sensitive element having an out-of-plane displacement with respect to the support in a detection direction under an effect of a pressure difference between the first and second faces;
- an anchoring device for anchoring the sensitive element to the support, said anchoring device comprising at least one beam rotationally articulated on the support by an articulation of which the axis of rotation is parallel to a plane of the sensor;
- and
- a force detector for detecting a force applied to the sensitive element by the pressure difference.
A microphone comprising:
- a pressure sensor that includes
- a support,
- at least one rigid sensitive element anchored to the support at a level of at least one anchoring zone, said sensitive element comprising parallel first and second faces to be subjected to pressures, said sensitive element having an out-of-plane displacement with respect to the support in a detection direction under an effect of a pressure difference between the first and second faces,
- an anchoring device for anchoring the sensitive element to the support, said anchoring device comprising at least one beam rotationally articulated on the support by an articulation of which the axis of rotation is parallel to a plane of the sensor, and
- a force detector for detecting a force applied to the sensitive element by the pressure difference.
Dependencies are inferred from the claim text.