Method of forming a packaged microphone
AssigneeInvenSense, Inc.
InventorsDavid Bolognia, Kieran Harney
Life of this patent
Estimating the term…
Abstract
A packaged microphone has a lid structure with an inner surface having a concavity, and a microphone die secured within the concavity. The packaged microphone also has a substrate coupled with the lid structure to form a package having an interior volume containing the microphone die. The substrate is electrically connected with the microphone die. In addition, the packaged microphone also has aperture formed through the package, and a seal proximate to the microphone die. The seal acoustically seals the microphone and the aperture to form a front volume and a back volume within the interior volume. The aperture is in acoustic communication with the front volume.
Claims18
A method of forming a packaged microphone, the method comprising:
- securing an array of covers to an array of molded frames to form an array of assemblies, each frame having a surface forming a concavity;
- mounting a plurality of microphone dies within a plurality of the concavities in the array of molded frames, each of the plurality of concavities having no more than one microphone die, the plurality of concavities supporting the plurality of microphone dies;
- securing an array of substrates to the array of assemblies to form an array of packages that each have an interior chamber, each of the array of packages having a seal that divides the interior chamber into a back volume and a front volume within the interior chamber, the plurality of microphone dies mounted within the plurality of concavities in a manner permitting ease of electrical interconnection with an underlying package base;
- and
- forming an aperture in the substrate or a lid structure of a corresponding microphone die in each of the plurality of microphone dies, the aperture permitting the acoustic signal to directly contacting the microphone die within the interior chamber;
- and
- dicing the array of packages to form individual packages.
Dependencies are inferred from the claim text.