Piezoelectric actuator, motor, robot, and method of driving piezoelectric actuator

A method of driving a piezoelectric actuator,

• wherein the piezoelectric actuator includes:
• a first piezoelectric vibrator including a first diaphragm and a plurality of first piezoelectric elements that are provided on the first diaphragm and include a first electrode, a second electrode, and a piezoelectric material layer held by the first electrode and the second electrode;
• a second piezoelectric vibrator including a second diaphragm and a plurality of second piezoelectric elements that are provided on the second diaphragm and include a first electrode, a second electrode, and a piezoelectric material layer held by the first electrode and the second electrode;
• and
• an inductor,
• in the piezoelectric actuator,
• a layout of the first piezoelectric vibrator in the first diaphragm is the same as a layout of the second piezoelectric vibrator in the second diaphragm, and
• positions of the plurality of first piezoelectric elements on the first diaphragm correspond to positions of the plurality of second piezoelectric elements on the second diaphragm, the second electrode of the plurality of first piezoelectric elements corresponds to the second electrode of the plurality of second piezoelectric elements, the corresponding second electrodes are connected via the inductor, and the first piezoelectric vibrator and the second piezoelectric vibrator are driven in phases opposite to each other.